NDLI: Design and fabrication of a novel six supports capacitive micro RF switches with Parylene-C as structural material

Content Provider	IEEE Xplore Digital Library
Author	Jian-Ming Chen Jian-Jun Zhao Guang-Min Wu Hua Wang Jun Li
Copyright Year	2006
Description	Author affiliation: Dept. of Phys., Kunming Univ. of Sci. & Technol. (Jian-Ming Chen)
Abstract	This paper introduce design and micro fabrication of a novel six supports shunt capacitive MEMS RF switch with Au/Parylene-C as structural material. This micro switch consists of a dual-layer actuator with 9.526 volts actuation voltage. This switch adopts novel six supports and double actuation electrodes. This special design can obtain good actuating properties, such as lower actuation voltage and more stable working states, and long lifetime etc. Due to complicated structure, the fabrication becomes more difficult. This paper focuses on the fabrication of the MEMS RF switch which can find its application in microwave and mobile communication device
Starting Page	569
Ending Page	571
File Size	392187
Page Count	3
File Format	PDF
ISBN	1424401607
DOI	10.1109/ICSICT.2006.306356
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2006-10-23
Publisher Place	China
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Fabrication Radio frequency Switches Micromechanical devices Voltage Gold Actuators Electrodes Communication switching Microwave devices
Content Type	Text
Resource Type	Article

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Design and fabrication of a novel six supports capacitive micro RF switches with Parylene-C as structural material