NDLI: Sub-fF trimmable readout circuit for tri-axes capacitive microaccelerometers

Content Provider	IEEE Xplore Digital Library
Author	Hyun Kyu Ouh Jungryoul Choi Jungwoo Lee Sangyun Han Sungwook Kim Jindeok Seo Kyomook Lim Hyoungho Ko
Copyright Year	2012
Description	Author affiliation: Department of Electronics, Chungnam National University, Daejeon, Korea (Jindeok Seo; Kyomook Lim; Hyoungho Ko) \|\| Leading Division, TLi Inc. Seongnam, Korea (Hyun Kyu Ouh; Jungryoul Choi; Jungwoo Lee; Sangyun Han; Sungwook Kim)
Abstract	As the sensing capacitances of the recent microaccelerometers become smaller, a precise calibration method is highly required to compensate for the input parasitic capacitance mismatch. This paper presents a sub-fF trimmable readout circuit for capacitive tri-axes microaccelerometer. A charge sensitive amplifier (CSA) with correlated double sampling (CDS) and digital to-equivalent capacitance converter (DECC) is proposed. The DECC is implemented using 10-bit DAC, charge transfer switches, and a charge-storing capacitor. The DECC circuit can realize the equivalent capacitance of sub-fF range with a smaller area and higher accuracy than previous methods using series-connected capacitors. The readout circuit is implemented in a 0.18 μm 1P4M CMOS process. The readout circuit and MEMS sensing element are integrated in a single package. The supply voltage and the current consumption of analog blocks are 3.3 V and 230 μA, respectively. The sensitivities of tri-axes are measured to be 3.87 mg/LSB, 3.87 mg/LSB and 3.90 mg/LSB, respectively. The offset calibration which is controlled by 10-bit DECC has a resolution of 12.4 LSB per step with high linearity. The noise levels of tri-axes are 349 μg/√Hz, 341 μg/√Hz and 411 μg/√Hz at 2 kHz bandwidth.
Starting Page	1
Ending Page	4
File Size	651922
Page Count	4
File Format	PDF
ISBN	9781457717666
ISSN	19300395
e-ISBN	9781457717673
e-ISBN	9781457717659
DOI	10.1109/ICSENS.2012.6411568
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2012-10-28
Publisher Place	Taiwan
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Capacitance Calibration Capacitors Sensors Micromechanical devices Electronics packaging Noise
Content Type	Text
Resource Type	Article
Subject	Electrical and Electronic Engineering

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2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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