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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Jin-Chern Chiou Chia-Yang Lin Shang-Wei Tsai Wei-Che Hong |
| Copyright Year | 2012 |
| Description | Author affiliation: Department of Electrical Engineering, National Chiao-Tung University, Hsinchu, Taiwan 30010 (R.O.C.) (Jin-Chern Chiou; Chia-Yang Lin; Shang-Wei Tsai; Wei-Che Hong) |
| Abstract | In this study, the design and fabrication of a micromachined LPD-based SnO gas sensor integrated with TaN micro-hotplate was carried out by utilizing MEMS technology. In the characteristics of the micro-heater, thermal response, thermal distribution and power consumption of heated TaN micro-heater were measured by FLIR systems. For the sensing characterization, the sensing responses of LPD-based SnO gas sensor with TaN micro-heater to HS gas were measured in different operating temperatures. In sensing properties, the resistances of the gas sensor significantly change in the staircase concentration of HS gas and which optimal operating temperature was 250 °C. |
| Starting Page | 1 |
| Ending Page | 4 |
| File Size | 1386640 |
| Page Count | 4 |
| File Format | |
| ISBN | 9781457717666 |
| ISSN | 19300395 |
| e-ISBN | 9781457717673 |
| e-ISBN | 9781457717659 |
| DOI | 10.1109/ICSENS.2012.6411275 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2012-10-28 |
| Publisher Place | Taiwan |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Gas detectors Temperature measurement Heating Temperature sensors Films Temperature |
| Content Type | Text |
| Resource Type | Article |
| Subject | Electrical and Electronic Engineering |
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