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Content Provider | IEEE Xplore Digital Library |
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Author | En-Chiang Chang Yi-Lin Sun Pao-Te Lin Mikolas, D.G. Chien-Chung Fu |
Copyright Year | 2012 |
Description | Author affiliation: Institute of Nanoengineering and Microsystems, National Tsing Hua Univeristy, No. 101, Section 2, Kuang-Fu Road, Hsinchu, Taiwan 30013, R.O.C. (En-Chiang Chang; Yi-Lin Sun; Pao-Te Lin; Mikolas, D.G.; Chien-Chung Fu) |
Abstract | In this paper, a simple but stable laboratory scale laser interference lithography(LIL) system by using a single mode optical fiber (SMF) as a spatial filter, flexible beam transport path, and beam expander has been demonstrated. The linearly polarized light from a HeCd laser (λ=325nm) was coupled into one end of a UV SMF and used the expanding beam from the other end for LIL exposures using a Lloyd's mirror configuration. By using the output of the fiber as the source for the LIL system, the effects of pointing stability of the laser are eliminated. Although the SMF was not Polarization Maintaining (PM), the fiber could stably preserve the linear polarization of the light with I >100. In this system, the gratings were produced easily in photoresist with a period of 220nm over an area of several square centimeters. Exposure times over 10 minutes with expanded beams result in high contrast patterns without any need for any active feed-back or fringe-locking. |
Starting Page | 1 |
Ending Page | 4 |
File Size | 1337418 |
Page Count | 4 |
File Format | |
ISBN | 9781457717666 |
ISSN | 19300395 |
e-ISBN | 9781457717673 |
e-ISBN | 9781457717659 |
DOI | 10.1109/ICSENS.2012.6411576 |
Language | English |
Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
Publisher Date | 2012-10-28 |
Publisher Place | Taiwan |
Access Restriction | Subscribed |
Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
Subject Keyword | Laser beams Optical fiber polarization Fiber lasers Resists Spatial filters Laser stability |
Content Type | Text |
Resource Type | Article |
Subject | Electrical and Electronic Engineering |
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