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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Zong-Han Liu Chih-Hsiung Shen Shu-Jung Chen |
| Copyright Year | 2012 |
| Description | Author affiliation: Department of Mechatronics Engineering, National Changhua University of Education, NO. 2, Shi-Da Road, Changhua, Taiwan, R.O.C. (Zong-Han Liu; Chih-Hsiung Shen; Shu-Jung Chen) |
| Abstract | A new proposed gas sensor was built to achieve high field with the tip type electrode in a standard CMOS process. The increase of electric field will enhance the chemical reaction rate dramatically. Beyond the conventional chemical sensors with heating power to achieve a high sensitivity, we proposed a total new sensing mechanism with the short distance of electrodes which includes the different distance between electrodes with even higher sensitivity than before without any heating. To form the sensing material SnO, we first formed the material Fe with 0.86g FeCl + 1.4g FeCl using in 40ml HO at 80°C, and SnO solution is mixed at SnO = 3:1. After the micromachining of CMOS gas sensor, a spin-on of sensing material and the subsequent process of wire-bond were performed. The samples with several electric fields were under test and verified inside a CO gas chamber with the tip type electrode. With careful investigation of measurement results, it shows the proposed configuration with tip electrode sensor reaches the higher sensitivity with the higher electric field, while the normalized sensitivity rises from 107.6 %/ppm to 388 %/ppm under the applied electric field from 1.67 V/μm to 8.33 V/μm. Experimental measurement shows the research is available for CO sensor with high sensitivity under high electric field. |
| Starting Page | 1 |
| Ending Page | 4 |
| File Size | 945163 |
| Page Count | 4 |
| File Format | |
| ISBN | 9781457717666 |
| ISSN | 19300395 |
| e-ISBN | 9781457717673 |
| e-ISBN | 9781457717659 |
| DOI | 10.1109/ICSENS.2012.6411483 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2012-10-28 |
| Publisher Place | Taiwan |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Gas detectors Sensitivity Electric fields Electrodes Materials Metals |
| Content Type | Text |
| Resource Type | Article |
| Subject | Electrical and Electronic Engineering |
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