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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Joshi, S. Nayak, M.M. Rajanna, K. |
| Copyright Year | 2012 |
| Description | Author affiliation: Department of Instrumentation and Applied Physics, Indian Institute of Science, Bangalore - 560012, India (Joshi, S.; Rajanna, K.) || Centre for Nano Science and Engineering, Indian Institute of Science, Bangalore - 560012, India (Nayak, M.M.) |
| Abstract | In this paper, we report on the application aspect of piezoelectric ZnO thin film deposited on flexible phynox alloy substrate. Highly crystalline piezoelectric ZnO thin films were deposited by RF reactive magnetron sputtering and were characterized by XRD, SEM, AFM analysis. Also, the effective d coefficient value measurement was performed. The actuator element is a circular diaphragm of phynox alloy on to which piezoelectric ZnO thin film was deposited. ZnO film deposited actuator element was firmly fixed inside a suitable concave perspex mounting designed specifically for micro actuation purpose. The actuator element was excited at different frequencies for the supply voltages of 2V, 5V and 8V. Maximum deflection of the ZnO film deposited diaphragm was measured to be 1.25 μm at 100 Hz for the supply voltage of 8V. The developed micro actuator has the potential to be used as a micro pump for pumping nano liters to micro liters of fluids per minute for numerous biomedical and aerospace applications. |
| Starting Page | 1 |
| Ending Page | 4 |
| File Size | 1544567 |
| Page Count | 4 |
| File Format | |
| ISBN | 9781457717666 |
| ISSN | 19300395 |
| e-ISBN | 9781457717673 |
| e-ISBN | 9781457717659 |
| DOI | 10.1109/ICSENS.2012.6411523 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2012-10-28 |
| Publisher Place | Taiwan |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Zinc oxide Substrates Actuators Films Sputtering Sensors Piezoelectricity Micro actuator ZnO thin film |
| Content Type | Text |
| Resource Type | Article |
| Subject | Electrical and Electronic Engineering |
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