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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Kaimin Zhou Ziqiang Wang Fule Li Chun Zhang Zhihua Wang |
| Copyright Year | 2011 |
| Description | Author affiliation: Institute of Microelectronics, Tsinghua University, Beijing, China (Kaimin Zhou; Ziqiang Wang; Fule Li; Chun Zhang; Zhihua Wang) |
| Abstract | This paper presents a symmetrical readout circuit for capacitive sensors. Based on charge transfer principle, it is insensitive to stray capacitors. Introducing a reference branch, this symmetrical readout circuit can enlarge its linear range, reduce amplifier offsets and reject common-mode noise and even-order distortions. Chopper stabilization technique is used to reduce the negative effects of the amplifier offset and flicker (1/f) noise. A Verilog-A based varactor is used to model the real variable sensing capacitor. Simulation results are given for sensing capacitor changing frequency at 1 KHz. Metal-Insulator-Metal (MIM) capacitor array is designed on chip for measurement. Measurement results show that this circuit can achieve sensitivity of 370 mV/pF, linearity error below 1 % and power consumption as low as 2.5 mW. This symmetrical readout circuit can respond to FPGA controlled sensing capacitor array changed every 1 ms. |
| Starting Page | 1 |
| Ending Page | 4 |
| File Size | 1153235 |
| Page Count | 4 |
| File Format | |
| ISBN | 9781612848563 |
| ISSN | 15483746 |
| e-ISBN | 9781612848570 |
| e-ISBN | 9781612848556 |
| DOI | 10.1109/MWSCAS.2011.6026615 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2011-08-07 |
| Publisher Place | Korea (South) |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Semiconductor device measurement System-on-a-chip Calibration Sensitivity Micromechanical devices Capacitance |
| Content Type | Text |
| Resource Type | Article |
| Subject | Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering |
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