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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Sheng-Ren Chiu Chung-Yang Sue Chih-Hsiou Lin Shih-Ting Lin Shih-Chieh Lin Yu-Wen Hsu Yan-Kuin Su |
| Copyright Year | 2012 |
| Description | Author affiliation: Microsystems Technology Center, Industrial Technology Research Institute, Tainan City, Taiwan (Sheng-Ren Chiu; Chung-Yang Sue; Chih-Hsiou Lin; Shih-Ting Lin; Shih-Chieh Lin; Yu-Wen Hsu) || Institute of Microelectronics and Department of Electrical Engineering, Advanced Optoelectronic Technology Center, National Cheng Kung University, Tainan 701, Taiwan (Yan-Kuin Su) |
| Abstract | This paper deals with the design, fabrication and preliminary experimental characterizations of a novel integrated dual-axis tuning fork gyroscope (DTFG). The DTFG is fabricated by high-aspect-ratio silicon-on-glass (SOG) process and vacuum packaged by glass frit bonding. Furthermore, a CMOS drive/readout ASIC chip, which is fabricated by a 0.25 μm 1P5M standard CMOS process, is integrated with the fabricated DTFG by directly wire-bonding. The experimental results of DTFG demonstrate that the rate sensitivities of Z-axis and X-axis sense modes are 1.47 mV/DPS and 0.18 mV/DPS respectively and the associated R2-linearity are 0.9995 and 0.9996. The noise-floors are 0.030 DPS/ $Hz^{1/2}$ and 0.247 $DPS/Hz^{1/2}$ for Z-axis and X-axis sense modes respectively. |
| Starting Page | 1 |
| Ending Page | 4 |
| File Size | 1507018 |
| Page Count | 4 |
| File Format | |
| ISBN | 9781457717666 |
| ISSN | 19300395 |
| e-ISBN | 9781457717673 |
| e-ISBN | 9781457717659 |
| DOI | 10.1109/ICSENS.2012.6411139 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2012-10-28 |
| Publisher Place | Taiwan |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Gyroscopes Electrodes Fabrication Sensitivity Vibrations Glass CMOS integrated circuits |
| Content Type | Text |
| Resource Type | Article |
| Subject | Electrical and Electronic Engineering |
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