NDLI: A new stack electrode type CMOS compatible gas sensor

Content Provider	IEEE Xplore Digital Library
Author	Hsu-Pei Chen Chun-Ming Cheng Chih-Hsiung Shen Shu-Jung Chen
Copyright Year	2011
Description	Author affiliation: Department of Mechatronics Engineering, National Changhua University of Education, NO. 2, Shi-Da Road, Taiwan, R.O.C. (Hsu-Pei Chen; Chun-Ming Cheng; Chih-Hsiung Shen; Shu-Jung Chen)
Abstract	A new proposed gas sensor with stack electrodes was built to archive an ultra small gap of electrodes by using the metal layers in the standard CMOS process. Beyond the conventional finger-type electrodes, the stack electrodes formed from the inter metal layers of CMOS process provide a lower resistance contact with the sensing material. The proposed gas sensor was built with array of floating membranes and serially connected over an etched cavity. A micro heater of n-type polysilicon with 5.81 kΩ is situated beneath each active area of the membrane to obtain a stable working temperature with several power consumptions conditions. The sensing material SnO for CO detection was deposited onto the stack electrodes after sol-gel formation with deionized water and ammonia (NH3) to promote the hydrolysis and condensation. After the sensor fabricated, a test wire-bond and TO-5 package was performed and the sample was test and verified inside a CO gas chamber. With careful investigation of measurement results, the sensitivity of proposed monoxide sensor is 6.25%/ppm without heating and the sensitivity reaches to 15.7%/ppm under 172 µW heating power which is highly beyond the result of previous research work. The experimental measurement shows the research is applicable for a low cost CO sensor with high sensitivity.
Starting Page	1117
Ending Page	1120
File Size	990967
Page Count	4
File Format	PDF
ISBN	9781424492909
ISSN	19300395
e-ISBN	9781424492893
DOI	10.1109/ICSENS.2011.6127408
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2011-10-28
Publisher Place	Ireland
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	CMOS integrated circuits CMOS technology Heating MEMS SnO2 CMOS gas sensor
Content Type	Text
Resource Type	Article
Subject	Electrical and Electronic Engineering

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1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
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9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

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