NDLI: Thomson scattering diagnostics and computational modeling of a low pressure microwave excited microplasma source

Content Provider	IEEE Xplore Digital Library
Author	Denning, C.M. Partridge, G. Urdahl, R. Peng Tian Kushner, M.J.
Copyright Year	2013
Description	Author affiliation: Dept. EECS, Univ. of Michigan, Ann Arbor, MI, USA (Peng Tian; Kushner, M.J.) \|\| Agilent Technol. Inc., Santa Clara, CA, USA (Denning, C.M.; Partridge, G.; Urdahl, R.)
Abstract	Summary form only given. Low-pressure microwave-excited $microplasmas^{1}$ are promising sources of VUV photons for a variety of applications, including photoionization for mass spectrometry. A split-ring resonator microstrip architecture can be used to initiate and sustain these microplasmas using the extremely high electric field generated in the sub-millimeter gap between electrodes. The VUV flux, primarily the result of resonance radiation following electronic excitation of rare gas atoms, is a sensitive function of the distribution of electron energies. Direct measurement of the electron energy distribution (EED) could provide critical insight into the physics of the microplasma operation. We present Thomson scattering measurements of the EED in a split-ring resonator argon microplasma operating at 2.5 GHz and approximately 1 Torr. The diagnostic consists of a Q-switched Nd:YAG laser operating at 532 nm. Thomsonscattered light is collected with a high throughput (f/2) triple grating imaging spectrometer and an intensified CCD camera gated to the laser pulses. Stray and Rayleigh-scattered laser light, which can exceed the intensity of the Thomsonscattered light by factors of over 105, is filtered out using a mask placed between the first two gratings, which are operated in subtractive mode. Other available diagnostics include VUV flux measured using a vacuum UV monochromator. Plasma parameters are measured as a function of gas flow rate, absorbed microwave power, and spatial location both within the plasma cavity and in the downstream plume. Experimental results of the EED and VUV flux are compared with computational modeling using the Hybrid Plasma Equipment Model $(HPEM).^{2}$ In this model, the EED and radiation transport are computed using Monte Carlo simulations, and neutral gas and plasma transport are addressed using fluid techniques. These experimental and computational modeling results provide a means for optimizing the VUV flux produced by the source.
Starting Page	1
Ending Page	1
File Size	97271
Page Count	1
File Format	PDF
ISBN	9781467351713
ISSN	07309244
DOI	10.1109/PLASMA.2013.6635165
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2013-06-16
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Decision support systems
Content Type	Text
Resource Type	Article
Subject	Atomic and Molecular Physics, and Optics Condensed Matter Physics Electrical and Electronic Engineering

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

Atmospheric pressure microwave-powered microplasma source

UV emission and probe diagnostics and computational modeling of a low pressure microwave excited microplasma source

Evaluation of Nd-glass laser systems for incoherent Thomson scattering diagnostics of low density plasmas

Atmospheric pressure microwave-powered microplasma source based on strip-line structure

Decontamination of microorganisms by low-temperature atmospheric pressure microplasma

Repetitive x-ray source using triboluminescence

Laser thomson scattering measurement in low temperature plasma

Film deposition using a non-thermal microwave-generated microplasma at atmospheric pressure

Preliminary x-ray Thomson scattering using the hybrid x-pinch as a probe source

Thomson scattering diagnostics and computational modeling of a low pressure microwave excited microplasma source

Similar Documents

Atmospheric pressure microwave-powered microplasma source

UV emission and probe diagnostics and computational modeling of a low pressure microwave excited microplasma source

Evaluation of Nd-glass laser systems for incoherent Thomson scattering diagnostics of low density plasmas

Atmospheric pressure microwave-powered microplasma source based on strip-line structure

Decontamination of microorganisms by low-temperature atmospheric pressure microplasma

Repetitive x-ray source using triboluminescence

Laser thomson scattering measurement in low temperature plasma

Film deposition using a non-thermal microwave-generated microplasma at atmospheric pressure

Preliminary x-ray Thomson scattering using the hybrid x-pinch as a probe source

Thomson scattering diagnostics and computational modeling of a low pressure microwave excited microplasma source