NDLI: Spatially confined air microplasmas in an array of microcavity devices with asymmetric air flow geometry

Content Provider	IEEE Xplore Digital Library
Author	Hee Jun Yang Min Hwan Kim Jin Hoon Cho Sung-Jin Park Eden, J.G.
Copyright Year	2013
Description	Author affiliation: Dept. of Electr. & Comput. Eng., Univ. of Illinois, Urbana, IL, USA (Hee Jun Yang; Min Hwan Kim; Jin Hoon Cho; Sung-Jin Park; Eden, J.G.)
Abstract	Summary form only given. Arrays of microcavity devices designed for the operation in a forced flow of laboratory air. Microcavities having a diameter of 100 ~300 μm and are encapsulated and protected with a $Al_{2}O_{3}$ ring-shaped dielectric for the protection from plasma sputtering. With a micropatterning process by simple lithography and a microfabrication technique for microcavity formation, precise control of microcavity and its array geometry was obtained with an accuracy of less than 5 %. In particular, to control the plasma properties and flow dynamics of air inside the microcavities of device, the shape of microcavity has been modified to be asymmetric between electrodes. The device was stably operated in air with flow rate of 180-6000 cfm which are equivalent to the velocity of 2.5-7 m/s. Confinement of air plasma inside the microcavity was measured by optical microscopy and ozone generation from the array was measured quantitatively by calibrated UV absorption spectroscopy. Detailed performance and spatial distribution of microdischarges in different air flow rates will discussed in this presentation.
Starting Page	1
Ending Page	1
File Size	124746
Page Count	1
File Format	PDF
ISBN	9781467351713
ISSN	07309244
DOI	10.1109/PLASMA.2013.6634981
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2013-06-16
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Microcavities Arrays Optical variables measurement Image motion analysis Computer vision Geometry Laboratories
Content Type	Text
Resource Type	Article
Subject	Atomic and Molecular Physics, and Optics Condensed Matter Physics Electrical and Electronic Engineering

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4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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