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Content Provider | IEEE Xplore Digital Library |
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Author | Hyowon Bae Jung Yeol Lee Hae June Lee Verboncoeur, J.P. |
Copyright Year | 2013 |
Description | Author affiliation: Michigan State Univ., East Lansing, MI, USA (Verboncoeur, J.P.) || Pusan Nat. Univ., Busan, South Korea (Hyowon Bae; Jung Yeol Lee; Hae June Lee) |
Abstract | Summary form only given. Recently, atmospheric pressure micro plasmas have attracted increasing interests for useful applications such as surface modification and bio-medical treatment. Among many atmospheric pressure plasma devices, a dielectric barrier discharge (DBD) is conventionally used to sustain a glow discharge within a short gap. However, experimental diagnostics of micro DBDs are limited due to the small size and highly collisional plasma properties. Thus, computer simulation is useful to understand the characteristics of DBDs under wide variations of driving conditions and geometry of the device. In this study, we report the investigation of micro DBDs using a fluid model and a particle-in-cell (PIC) simulation coupled with Monte Carlo collision (MCC). The one-dimensional PIC-MCC simulation code XPDP1 was adopted to investigate the discharge characteristics of a planar micro DBD with pure helium with a driving frequency from 13.56 to 474 MHz. It was found that the transition of different heating modes and power matching to external circuit are related to the ratio of ion transit time to the RF period. In addition, a two-dimensional fluid model and a PIC-MCC simulation were used to investigate the effect of electrode and dielectric surface shape as well as driving frequency in a coplanar discharge. |
Starting Page | 1 |
Ending Page | 1 |
File Size | 98155 |
Page Count | 1 |
File Format | |
ISBN | 9781467351713 |
ISSN | 07309244 |
DOI | 10.1109/PLASMA.2013.6634978 |
Language | English |
Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
Publisher Date | 2013-06-16 |
Publisher Place | USA |
Access Restriction | Subscribed |
Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
Subject Keyword | Discharges (electric) Atmospheric modeling Dielectrics Computational modeling Integrated circuit modeling Educational institutions Surface discharges |
Content Type | Text |
Resource Type | Article |
Subject | Atomic and Molecular Physics, and Optics Condensed Matter Physics Electrical and Electronic Engineering |
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