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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Thomas, M.A. Jingbiao Cui |
| Copyright Year | 2013 |
| Description | Author affiliation: Dept. of Phys. & Astron., Univ. of Arkansas at Little Rock, Little Rock, AR, USA (Thomas, M.A.; Jingbiao Cui) |
| Abstract | A variety of highly tunable ZnO films have been deposited by atomic layer deposition. The optical and electrical properties of the ZnO films are well controlled by either doping with Mg or utilizing in-situ oxygen or hydrogen plasma treatments during deposition. The wide range of physical properties of these ZnO films enables their use as buffer, intrinsic, and top contact layers in thin film solar cells. The single fabrication process maintains high quality interfaces between each layer in the solar cell, and the precise control of the ZnO films' properties allows for true device optimization. |
| Sponsorship | IEEE Electron Devices Soc. |
| Starting Page | 1187 |
| Ending Page | 1191 |
| File Size | 474437 |
| Page Count | 5 |
| File Format | |
| DOI | 10.1109/PVSC.2013.6744352 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2013-06-16 |
| Publisher Place | USA |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Zinc oxide Plasmas Photovoltaic cells Conductivity Hydrogen Buffer layers zinc compounds doping plasma materials processing semiconductor films solar energy |
| Content Type | Text |
| Resource Type | Article |
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