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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Tao Chen Kohler, F. Heidt, A. Carius, R. Finger, F. |
| Copyright Year | 2013 |
| Description | Author affiliation: IEK-5 Photovoltaik, Forschungszentrum Julich, Jülich, Germany (Tao Chen; Kohler, F.; Heidt, A.; Carius, R.; Finger, F.) |
| Abstract | Transparent and conductive microcrystalline silicon carbide (μc-SiC:H) thin films are an excellent window layer for thin film solar cells. For amorphous silicon based solar cells, p-type conductive μc-SiC:H window layers were deposited by the hot-wire chemical vapor deposition (HWCVD) technique. Monomethylsilane (MMS) highly diluted in hydrogen was used as the SiC source in favor of SiC deposition in a stoichiometric form. Aluminum (Al) introduced from Trimethylaluminum (TMAl) was used as the p-type dopant. In this report, the optoelectronic properties of p-type μc-SiC:H thin films prepared with different deposition pressure and filament temperature were investigated. By managing the deposition parameters, materials with optical gap $E_{04}$ ranging from 2.0 eV to 2.8 eV and dark conductivity ranging from $10^{-5}$ S/cm to 0.1 S/cm were prepared. Such p-type μc-SiC:H thin films were applied as the window layer in amorphous silicon thin film silicon solar cells. Taking advantage of the high transparency of μc-SiC:H window layer, improved quantum efficiency was obtained at the short wavelength below 500 nm. |
| Sponsorship | IEEE Electron Devices Soc. |
| Starting Page | 0917 |
| Ending Page | 0920 |
| File Size | 3546715 |
| Page Count | 4 |
| File Format | |
| DOI | 10.1109/PVSC.2013.6744293 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2013-06-16 |
| Publisher Place | USA |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Photovoltaic cells Conductivity Optical films Silicon carbide Temperature measurement Silicon Thin films Material properties |
| Content Type | Text |
| Resource Type | Article |
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