NDLI: Characteristics of thin film piezoelectric ultrasonic transducer array by chemical solution deposition

Content Provider	IEEE Xplore Digital Library
Author	Palosaari, J. Juuti, J. Tyholdt, F. stbo, N.P. Vogl, A. Poppe, E. Gudbjornsson, S. Ringgaard, E. Hok, B. Fagerman, P.-E. Glersen, P. Raeder, H. Jantunen, H.
Copyright Year	2009
Description	Author affiliation: Microelectronics and Materials Physics Laboratories, EMPART Research Group of Infotech, P.O.Box 4500, Fin-90014, University of Oulu, Finland (Palosaari, J.; Juuti, J.; Tyholdt, F.; stbo, N.P.; Vogl, A.; Poppe, E.; Gudbjornsson, S.; Ringgaard, E.; Hok, B.; Fagerman, P.-E.; Glersen, P.; Raeder, H.; Jantunen, H.)
Abstract	In this paper, thin film piezoelectric ultrasonic transducers with a two electrode design and various different membrane sizes were manufactured and characterized. The transducers were fabricated on a silicon wafer by chemical solution deposition (CSD) where PZT was deposited with a total thickness of ∼2 µm. Afterwards, cavities were wet etched underneath the piezoelectric layer creating bending membranes with a total thickness of ∼13 µm and cavity sizes from 0.056 $mm^{2}$ to 0.181 $mm^{2}.$ Then the transducers were poled and their electromechanical properties were measured with laser vibrometer. The membranes resonance frequencies and quality factors were measured at ∼780–2000 kHz and 70–135, respectively, and effective d coefficients from 100–290 nm/V.
Starting Page	1734
Ending Page	1737
File Size	894257
Page Count	4
File Format	PDF
ISBN	9781424443895
ISSN	19485727
DOI	10.1109/ULTSYM.2009.5441653
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2009-09-20
Publisher Place	Italy
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Ultrasonic transducer arrays Piezoelectric films Sputtering Ultrasonic transducers Chemical transducers Biomembranes Piezoelectric transducers Electrodes Pulp manufacturing Silicon CSD piezoelectric ultrasonic transducer
Content Type	Text
Resource Type	Article

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