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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Aubert, T. Elmazria, O. Assouar, B. Bouvot, L. Bournebe, Z. Hehn, M. Weber, S. Oudich, M. Alnot, P. |
| Copyright Year | 2009 |
| Description | Author affiliation: Institut Jean Lamour, UMR 7198 CNRS - Nancy University, 54506 Vandoeuvre lès Nancy, France (Aubert, T.; Elmazria, O.; Assouar, B.; Bouvot, L.; Bournebe, Z.; Hehn, M.; Weber, S.; Oudich, M.; Alnot, P.) |
| Abstract | In this paper, we report on the use of tantalum and iridium as adhesion layers for platinum electrodes used in high temperature SAW devices based on langasite substrates (LGS). Unlike iridium, tantalum exhibits a great adhesive strength, and a very low mobility through the Pt film, ensuring a device lifetime of at least half an hour at 1000°C. The latter is limited by morphological modifications of platinum, starting by the apparition of crystallites on the surface, and followed by important terracing and breaking of the film continuity. SNMS and XRD measurements allowed us to show that these phenomena are likely intrinsic to platinum film, whatever be the nature of the adhesion layer. Finally, after having outlined a possible scenario leading to this deterioration, we consider some solutions that could replace platinum in order to increase the lifetime of LGS-based SAW devices in high temperatures conditions. |
| Starting Page | 1672 |
| Ending Page | 1675 |
| File Size | 3581631 |
| Page Count | 4 |
| File Format | |
| ISBN | 9781424443895 |
| ISSN | 19485727 |
| DOI | 10.1109/ULTSYM.2009.5441517 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2009-09-20 |
| Publisher Place | Italy |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Adhesives Surface acoustic wave devices Platinum Zirconium Optical films Substrates Titanium Stability Temperature sensors Electrodes tantalum high temperature platinum SAW langasite |
| Content Type | Text |
| Resource Type | Article |
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