NDLI: Suppression of parasitic resonance in piezoresistively transduced longitudinal mode MEMS resonators

Content Provider	IEEE Xplore Digital Library
Author	Yan, J. Lin, A.T.-H. Seshia, A.A.
Copyright Year	2009
Description	Author affiliation: Department of Engineering, University of Cambridge, United Kingdom (Yan, J.; Lin, A.T.-H.; Seshia, A.A.)
Abstract	This paper demonstrates the suppression of parasitic resonance in a piezoresistively transduced [1–3] longitudinal mode MEMS resonator, wherein beams are electrostatically excited in a combined extensional mode with an associated frequency-Q product of 3.28 × $10^{12}.$ The response of the beam is sensed using both capacitive and piezoresistive transduction principles. The resonator consists of six parallel beams linked to a central anchor and a pair of symmetrical parallel beams that force the beams to vibrate in-phase. The mode suppression in the resonator is compared with other structures by finite element analysis (FEA). The relative distribution of strain energies in both the resonant structure and anchors [5] and in both primary and secondary directions of vibration are proposed as figures of merit to compare this device to previously reported longitudinal mode beam resonators [2,4,6,7]. The design optimization of longitudinal mode beam resonators is also discussed.
Starting Page	2149
Ending Page	2152
File Size	1111457
Page Count	4
File Format	PDF
ISBN	9781424443895
ISSN	19485727
DOI	10.1109/ULTSYM.2009.5441572
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2009-09-20
Publisher Place	Italy
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Resonance Piezoresistance Micromechanical devices Optical resonators Structural beams Frequency Vibrations Design optimization Silicon Capacitive sensors parasitic resonance Piezoresistive sensing longitudinal mode MEMS resonators
Content Type	Text
Resource Type	Article

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