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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Wang, Y. Yang, Z. Chen, W. Ding, G. Zhang, C. Zhao, X. |
| Copyright Year | 2015 |
| Description | Author affiliation: Shanghai Jiao Tong Univ., Shanghai, China (Wang, Y.; Yang, Z.; Chen, W.; Ding, G.; Zhang, C.; Zhao, X.) |
| Abstract | An inertia switch with flexible carbon nanotubes and copper (CNTs/Cu) composite array layer between movable and fixed electrodes has been designed, fabricated and characterized, which achieved long contact time compared to the traditional design using rigid-to-rigid impact between electrodes. The CNTs/Cu layer is fabricated using the composite electroplating method and the whole device is completed by multi-layer metal electroplating based on the micro-electro-mechanical systems (MEMS) process. The dynamic response of the designed inertia switch and the contact impact between single CNT and fixed electrode/another CNT have been both simulated by ANSYS finite element method. Finally, the fabricated MEMS inertia switch with flexible CNTs/Cu composite array layer between electrodes has been evaluated using a dropping hammer system. The test contact time is about 112μs, which has a good agreement with the simulation and is much longer than that of the traditional design. |
| Starting Page | 1101 |
| Ending Page | 1104 |
| File Size | 2886419 |
| Page Count | 4 |
| File Format | |
| ISBN | 9781479989553 |
| ISSN | 21641641 |
| DOI | 10.1109/TRANSDUCERS.2015.7181119 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2015-06-21 |
| Publisher Place | USA |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Switches Contacts Electrodes Arrays Acceleration Nickel Sensors composite electroplating MEMS CNTs/Cu flexible layer inertia switch contact time |
| Content Type | Text |
| Resource Type | Article |
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