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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Bin Fan Rechenberg, R. Becker, M.F. Wen Li |
| Copyright Year | 2015 |
| Description | Author affiliation: Michigan State Univ., East Lansing, MI, USA (Bin Fan; Wen Li) || Fraunhofer USA-CCD, East Lansing, MI, USA (Rechenberg, R.; Becker, M.F.) |
| Abstract | This paper reports a novel fabrication process of transferring polycrystalline diamond (PCD) from a 3-inch silicon wafer onto a flexible Parylene-C substrate. Combining Parylene-C with PCD can improve the mechanical flexibility while preserving the benefits of PCD (biocompatibility, chemical inertness, high thermal conductivity and feasibility of being selectively doped to be a semiconductor or insulator). This fabrication process breaks the barrier that PCD cannot grow on flexible polymeric substrate due to high temperature processes (500-900°C), which exceeds the melting point of most flexible polymers. As a demonstration of the technique, we transferred boron-doped polycrystalline diamond (BDD) on a Parylene-C substrate and assembled μLEDs on BDD for a potential application in optogenetics. Electrical and optical characteristics of a fabricated device were investigated and discussed in the paper. |
| Starting Page | 892 |
| Ending Page | 895 |
| File Size | 1536552 |
| Page Count | 4 |
| File Format | |
| ISBN | 9781479989553 |
| ISSN | 21641641 |
| DOI | 10.1109/TRANSDUCERS.2015.7181067 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2015-06-21 |
| Publisher Place | USA |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Data structures Boolean functions Diamonds Substrates Light emitting diodes Silicon Probes Parylene-C Flexible Boron Doped Polycrystalline Diamond |
| Content Type | Text |
| Resource Type | Article |
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