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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Tortschanoff, A. Baumgart, M. Lenzhofer, M. |
| Copyright Year | 2015 |
| Description | Author affiliation: Carinthian Tech Res. AG, Villach, Austria (Tortschanoff, A.; Baumgart, M.; Lenzhofer, M.) |
| Abstract | This paper reports a novel integration concept of an optical position feedback and driver unit for MOEMS scanner mirrors. The optical feedback scheme is based on a quadrant diode with a central hole. A compact PCB-based module was realized, which combines all necessary electrical, optical and mechanical aspects using existing manufacturing technologies. These modules provide a functional MOEMS packaging, which can be realized within short time at a minimum cost. |
| Starting Page | 220 |
| Ending Page | 223 |
| File Size | 2195496 |
| Page Count | 4 |
| File Format | |
| ISBN | 9781479989553 |
| ISSN | 21641641 |
| DOI | 10.1109/TRANSDUCERS.2015.7180901 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2015-06-21 |
| Publisher Place | USA |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Mirrors Optical sensors Optical feedback Optical reflection Adaptive optics Integrated optics Optical design Module Functional packaging MOEMS scanner position feedback System-in-Package SiP MEMS housing PCB |
| Content Type | Text |
| Resource Type | Article |
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