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Content Provider | IEEE Xplore Digital Library |
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Author | Gellineau, A. Wong, Y.-P. Wang, A. Butte, M.J. Solgaard, O. |
Copyright Year | 2015 |
Description | Author affiliation: Dept. of Electr. Eng., Stanford Univ., Stanford, CA, USA (Gellineau, A.; Solgaard, O.) || Dept. of Pediatrics, Stanford Univ., Stanford, CA, USA (Wang, A.; Butte, M.J.) || Dept. of Appl. Phys., Stanford Univ., Stanford, CA, USA (Wong, Y.-P.) |
Abstract | An atomic force microscope (AFM) integrated directly on the facet of a standard single-mode optical fiber is designed, fabricated, and tested. High resolution force sensing is achieved with a Fabry-Perot interferometer made of two photonic crystal (PC) mirrors separated by silicon springs. The device is fabricated with standard MEMS techniques and assembled on the facet of a single mode optical fiber by focus ion beam (FIB) welding and OmniProbe manipulation. We demonstrate that topographic and tip-sample interaction force information can be extracted from its reflected light. The force curve measurement has a resolution of $10pN/Hz^{0.5}$ in a drastically smaller footprint than traditional AFMs, which can enable in-vivo AFM imaging. |
Starting Page | 196 |
Ending Page | 199 |
File Size | 1347477 |
Page Count | 4 |
File Format | |
ISBN | 9781479989553 |
ISSN | 21641641 |
DOI | 10.1109/TRANSDUCERS.2015.7180895 |
Language | English |
Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
Publisher Date | 2015-06-21 |
Publisher Place | USA |
Access Restriction | Subscribed |
Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
Subject Keyword | Force Probes Mirrors Optical fiber sensors Optical fibers Silicon Photonic Crystal Atomic Force Microscopy Fabry-Perot Sensor |
Content Type | Text |
Resource Type | Article |
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