NDLI: P0-15 Temperature Compensated Bulk Acoustic Wave Resonator and its Predictive 1D Acoustic Tool for RF Filtering

Content Provider	IEEE Xplore Digital Library
Author	Petit, D. Abele, N. Volatier, A. Lefevre, A. Ancey, P. Carpentier, J.-F.
Copyright Year	2007
Description	Author affiliation: STMicroelectronics, Crolles (Petit, D.)
Abstract	The design of bulk acoustic wave "BAW" resonators should take into account the stringent requirements of thermal effects. In this paper, we propose a thermal model, allowing the reduction of the Temperature Coefficient of Frequency "TCF" with a slightly modified process while retaining a good coupling and quality factor. For a significant reduction of the TCF, a $SiO_{2}$ layer is added above the upper electrode. A TCF of +1.5 ppm/degC was obtained at 2.08 GHz. The present accuracy of the ID model is approximately 1 ppm/degC. Most material parameters were extracted by comparison between the modeling and the measurement of BAW resonators with different stacks. To improve the dispersion of the TCF, the uniformity of each layer is introduced into the model. Firstly, the reduction of the top $SiO_{2}$ Bragg layer thickness dispersion from 2 % to 0.2 % is achieved, using an ion etching. The compensation of BAW resonators in our process has been improving for PCS diversity standard. This model was used to design a Personal Communications Service "PCS" RX diversity filter (1.93-1.99 GHz). The compensated loaded and unloaded resonators were used in the filtering function and present TCFs between 0.8 and -7 ppm/degC with a coupling factor of approximately 5.2 %.
Starting Page	1243
Ending Page	1246
File Size	551896
Page Count	4
File Format	PDF
ISBN	9781424413836
ISSN	10510117
DOI	10.1109/ULTSYM.2007.312
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2007-10-28
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Acoustic waves Temperature Radio frequency Resonator filters Personal communication networks Filtering Thermal factors Q factor Electrodes Etching
Content Type	Text
Resource Type	Article

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