NDLI: High performance structurally decoupled micromachined gyroscope

Content Provider	IEEE Xplore Digital Library
Author	Dingbang Xiao Xuezhong Wu Zhanqiang Hou Shengyi Li
Copyright Year	2008
Description	Author affiliation: Microsyst. Lab., Nat. Univ. of Defense Technol., Changsha (Dingbang Xiao; Xuezhong Wu; Zhanqiang Hou; Shengyi Li)
Abstract	In order to suppress the quadrature error in micromachined gyroscopes, various decoupled structures have been designed employing independent suspension beams for the drive and sense modes. The new decoupled structure presented in this paper employs a vibration isolation frame and independent inertial masses for the drive and sense modes. This frame can not only prevent the oscillation of the drive masses coupling to the sense masses, but also pass the Coriolis forces on the drive masses to the sense masses. A gyroscope sample and its read-out circuit are fabricated. The quality factors of the drive and sense modes in atmosphere are measured as 800 and 34, and the resonance frequencies of the drive and sense modes are 2.981 kHz and 2.813 kHz. The scale factor of this gyroscope is 38 mV/(deg/sec) with a nonlinearity better than 0.8% in a measurement range of plusmn100deg/sec, and the short-term bias stability in half an hour is 0.28deg/sec.
Starting Page	403
Ending Page	406
File Size	1311972
Page Count	4
File Format	PDF
ISBN	9781424425808
ISSN	19300395
DOI	10.1109/ICSENS.2008.4716464
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2008-10-26
Publisher Place	Italy
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Gyroscopes Silicon Sputter etching Glass Resonance Resonant frequency Fabrication Atmospheric measurements Electrodes Laboratories
Content Type	Text
Resource Type	Article
Subject	Electrical and Electronic Engineering

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