NDLI: Low-drift U-shaped thermopile flow sensor

Content Provider	IEEE Xplore Digital Library
Author	Dijkstra, M. Lammerink, T.S.J. de Boer, M.J. Berenschot, J.W. Wiegerink, R.J. Elwenspoek, M.C.
Copyright Year	2008
Description	Author affiliation: MESA+ Inst. for Nanotechnol, Univ. of Twente, Enschede (Dijkstra, M.; Lammerink, T.S.J.; de Boer, M.J.; Berenschot, J.W.; Wiegerink, R.J.; Elwenspoek, M.C.)
Abstract	A thermal flow sensor has been realised consisting of a freely-suspended U-shaped microchannel. The structure is symmetrically heated by a heater at the top of the U-shape. The thermal imbalance caused by liquid flow is sensed by an integrated $Al/poly-Si^{++}$ thermopile. The U-shape microchannel facilitates the integration of a large number of thermocouple junctions, resulting in a highly-sensitive calorimetric flow sensor (40 $mV/mulldrmin^{-1}$ at 2 mW heating power). The heating power is controlled accurately by forcing a current, while measuring the voltage over the heater resistor. Influences of thermal gradients across the chip are minimised by the freely-suspended microchannel ends being fixed to the substrate over a small distance. The inherently zero-offset of the thermopile can furthermore be exploited in a control system cancelling temperature imbalance by liquid flow using additional heaters. This makes the flow sensor independent of heater resistor values and thermopile output characteristics. Accurate measurements up to 400 $nlldrmin^{-1}$ water flow have been obtained applying a temperature-balancing control system.
Starting Page	66
Ending Page	69
File Size	1354217
Page Count	4
File Format	PDF
ISBN	9781424425808
ISSN	19300395
DOI	10.1109/ICSENS.2008.4716384
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2008-10-26
Publisher Place	Italy
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Thermal sensors Microchannel Temperature control Fluid flow Heating Resistors Control systems Voltage control Current measurement Power measurement
Content Type	Text
Resource Type	Article
Subject	Electrical and Electronic Engineering

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4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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