NDLI: Novel SOI inertial sensors with optical readout based on transparent metals

Content Provider	IEEE Xplore Digital Library
Author	Baglio, S. Cappeddu, M. Savalli, N. Trigona, C. Bloemer, M. Scalora, M. Larciprete, M.C.
Copyright Year	2008
Description	Author affiliation: Dip. di Energetica, Univ. di Roma La Sapienza, Roma (Larciprete, M.C.) \|\| Dip. di Ing. Elettr. Elettron. e dei Sist., Univ. of Catania, Catania (Baglio, S.; Cappeddu, M.; Savalli, N.; Trigona, C.) \|\| AMSRD-WS-ST, Charles M. Bowden Res. Center, Huntsville, AL (Bloemer, M.; Scalora, M.)
Abstract	A novel optical microsensor has been fabricated using a SOI-based technology. The basic device is a symmetric flexure in which the central plate is used both as seismic mass and as optical target for displacement measurements. The device includes a multilayer, metal-dielectric Photonic Band Gap (PBG) structure, deposited on a flat substrate and bonded topside at a fixed distance from the movable plate. The reflection intensity of a light beam, pointed to the overall optical structure (top PBG, air gap, the moving plate), will depend on the air gap thickness whose value is determined by the displacement of the proof mass induced by the measurand, the external force. In particular, the realization of highly sensitive accelerometers is addressed here, the structure presented allows for detecting accelerations of the order of a few mG that produce displacements of the plate of few nanometers. Experimental prototypes have been realized and some results are shown here.
Starting Page	333
Ending Page	336
File Size	388989
Page Count	4
File Format	PDF
ISBN	9781424425808
ISSN	19300395
DOI	10.1109/ICSENS.2008.4716449
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2008-10-26
Publisher Place	Italy
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Optical sensors Displacement measurement Force measurement Microsensors Optical devices Nonhomogeneous media Photonic band gap Bonding Optical reflection Thickness measurement
Content Type	Text
Resource Type	Article
Subject	Electrical and Electronic Engineering

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