NDLI: On readouts of multiple micro/nano resonator sensors with mismatch

Content Provider	IEEE Xplore Digital Library
Author	Choubey, B. Ward, M. Collins, S.
Copyright Year	2008
Description	Author affiliation: Dept. of Eng. Sci., Univ. of Oxford, Oxford (Choubey, B.; Collins, S.) \|\| Mech. & Manuf. Eng., Univ. of Birmingham, Birmingham (Ward, M.)
Abstract	Resonators are used to detect small mass changes, which in turn can be used to detect vapours, chemicals, viruses etc. The sensitivity of these detectors can be enhanced by decreasing their mass using micro/nano technologies. However, this leads to a reduction in their effective surface area. To increase the available surface area, several detectors can be manufactured on the same substrate. Parallel excitation and summing of the outputs of the different detectors is the least bandwidth exhaustive readout mechanism for this type of system. However, mismatch between the detectors, which arises due to manufacturing variations, introduces errors in the detection system. In this paper, we study the effect of mismatch on the performance of micro/nano mass sensors with parallel readout. It is shown that resonators with high quality factors, which are otherwise desirable, are also highly susceptible to mismatch. Coupling between the detectors is suggested as a technique to remove the effects of mismatch without increasing the output bandwidth.
Starting Page	478
Ending Page	481
File Size	299306
Page Count	4
File Format	PDF
ISBN	9781424425808
ISSN	19300395
DOI	10.1109/ICSENS.2008.4716481
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2008-10-26
Publisher Place	Italy
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Detectors Manufacturing Bandwidth Resonant frequency Chemical sensors Mechanical sensors Q factor Circuits Differential equations Damping
Content Type	Text
Resource Type	Article
Subject	Electrical and Electronic Engineering

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