NDLI: A porous silicon JFET gas sensor: Experimental and modeling

Content Provider	IEEE Xplore Digital Library
Author	Barillaro, G. Lazzerini, G.M. Strambini, L.M.
Copyright Year	2008
Description	Author affiliation: Dipt. di Ing. dell'Inf., Univ. di Pisa, Pisa (Barillaro, G.; Lazzerini, G.M.; Strambini, L.M.)
Abstract	In this work, electrical measurements and modeling of an integrated porous silicon (PS) JFET (PSJFET) gas sensor are reported. The experimental $I_{DS}-V_{DS}$ curves were measured for different $V_{GS}$ voltages, both in synthetic air and in presence of 300 ppb of $NO_{2}.$ The modeling was carried out by taking both the PS layer and the FET structure into account. By best fitting the experimental data with the given model, a quantitative evaluation of the effect of $NO_{2}$ on both the PS layer and the FET structure was performed. Firstly, an indirect estimation of the PS resistance values in air $(R_{PS_AIR}~31$ kOmega) and in $NO_{2}$ $(R_{PS_NO2}~3.2$ kOmega) was achieved, in agreement with data reported in literature and acquired by direct electrical measurements on PS. Moreover, it was also estimated that exposure to 300 ppb of $NO_{2}$ resulted in a reduction of the FET channel section of ~0.2 mum, with respect to air.
Starting Page	494
Ending Page	497
File Size	337212
Page Count	4
File Format	PDF
ISBN	9781424425808
ISSN	19300395
DOI	10.1109/ICSENS.2008.4716485
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2008-10-26
Publisher Place	Italy
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Silicon Gas detectors Chemical sensors FETs Sensor phenomena and characterization Fabrication Electronic circuits Semiconductor device modeling Electric variables measurement Voltage
Content Type	Text
Resource Type	Article
Subject	Electrical and Electronic Engineering

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4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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