NDLI: Comparision of sol-gel and sputtering method properties of TiO thin film ultraviolet sensor

Content Provider	IEEE Xplore Digital Library
Author	Shih-Hua Hsiao Jyh-Ling Lin Yuan-Lung Chin Tai-Ping Sun
Copyright Year	2008
Description	Author affiliation: Dept. of Mechatron. Eng., Huafan Univ., Taipei (Shih-Hua Hsiao; Jyh-Ling Lin; Yuan-Lung Chin) \|\| Dept. of Electr. Eng., Nat. Chi Nan Univ., Nantou (Tai-Ping Sun)
Abstract	The objective of this paper is to realize a UV sensor with an $Al/TiO_{2}/ITO$ structure and the high quality $TiO_{2}$ thin films were grown on ITO substrates prepared by sputtering and the sol-gel method at 300degC. The proposed UV device adopted metal semiconductor metal (MSM) light-dependent resistor has characteristics of varying film thickness, and high photo-electric and stability. The photo-electric measurements show that thin film thickness could remarkably influence the photo-electric properties of the $TiO_{2}$ electrodes. In the sputtering method, film is produced 300 nm with high quality crystal and strong photoelectric activity, showing the largest photo-current. With the sol-gel method, film is produced at 50 nm showing the largest photo-current. The UV photo response of sputtered $TiO_{2}$ film and sol-gel $TiO_{2}$ film were about 0.14 $mAW^{-1}$ and 0.06 $mAW^{-1}$ respectively. In this study, the crystal quality, optical and electrical properties of these high quality $TiO_{2}$ thin films were investigated using scanning electron microscopy (SEM), optical absorption and I-V measurements.
Starting Page	321
Ending Page	324
File Size	300636
Page Count	4
File Format	PDF
ISBN	9781424425808
ISSN	19300395
DOI	10.1109/ICSENS.2008.4716446
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2008-10-26
Publisher Place	Italy
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Sputtering Optical films Thin film sensors Indium tin oxide Semiconductor thin films Semiconductor films Electron optics Optical sensors Optical microscopy Scanning electron microscopy
Content Type	Text
Resource Type	Article
Subject	Electrical and Electronic Engineering

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