NDLI: A highly double-decoupled self-oscillation gyroscope operating at atmospheric pressure

Content Provider	IEEE Xplore Digital Library
Author	Haitao Ding Jian Cui Xuesong Liu Xiaozhu Chi Zhenchuan Yang Guizhen Yan
Copyright Year	2008
Description	Author affiliation: Inst. of Microelectron., Peking Univ., Beijing (Haitao Ding; Jian Cui; Xuesong Liu; Xiaozhu Chi; Zhenchuan Yang; Guizhen Yan)
Abstract	In this paper, a highly double-decoupled selfoscillation gyroscope is presented. Deliberate frame demonstrates small cross talk between drive mode and sense mode of less than 0.5% simulated by FEM tool and 1.35% verified by experimental measurements. Tested results exhibit that the bandwidth of the structure has a good immunity to fabrication imperfections. With the deployment of area-varied capacitors and high aspect-ratio structures, large quality factors and low drive voltage are achieved operating at atmospheric pressure, which are 217 and 97 for drive mode and sense mode, respectively, with a 1Vpeak-peak AC drive voltage and 10 V DC bias. Measured scale factor is 10.7 mv/deg/s with a $R^{2}-nonlinearity$ of 0.12% in the range of plusmn300deg/s. The noise equivalent rate is $0.0013deg/s/Hz^{1/2}$ $(=4.68deg/h/Hz^{1/2})$ over 100 Hz bandwidth. The bias stability can achieve 1deg/s for a 6-hour measurement and 0.3deg/s for 120 seconds without any temperature control method employed (1-sigma).
Starting Page	674
Ending Page	677
File Size	569062
Page Count	4
File Format	PDF
ISBN	9781424425808
ISSN	19300395
DOI	10.1109/ICSENS.2008.4716531
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2008-10-26
Publisher Place	Italy
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Gyroscopes Atmospheric measurements Bandwidth Atmospheric modeling Fabrication Capacitors Q factor Low voltage Stability Temperature control
Content Type	Text
Resource Type	Article
Subject	Electrical and Electronic Engineering

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