NDLI: SOI diode temperature sensor operated at ultra high temperatures

Content Provider	IEEE Xplore Digital Library
Author	Santra, S. Guha, P.K. Ali, S.Z. Haneef, I. Udrea, F. Gardner, J.W.
Copyright Year	2008
Description	Author affiliation: Sch. of Eng., Univ. of Warwick, Coventry (Gardner, J.W.) \|\| Eng. Dept., Univ. of Cambridge, Cambridge (Santra, S.; Guha, P.K.; Ali, S.Z.; Haneef, I.; Udrea, F.)
Abstract	This paper investigates the performance of diode temperature sensors when operated at ultra high temperatures (above 250degC). A low leakage silicon on insulator (SOI) diode was designed and fabricated in a 1 mum CMOS process and suspended within a dielectric membrane for efficient thermal insulation. The diode can be used for accurate temperature monitoring in a variety of sensors such as microcalorimeters, IR detectors, or thermal flow sensors. A CMOS compatible micro-heater was integrated with the diode for local heating. It was found that the diode forward voltage exhibited a linear dependence on temperature as long as the reverse saturation current remained below the forward driving current. We have proven experimentally that the maximum temperature can be as high as 550degC. Long term continuous operation at high temperatures (400degC) showed good stability of the voltage drop. Furthermore, we carried out a detailed theoretical analysis to determine the maximum operating temperature and explain the presence of nonlinearity factors at ultra high temperatures.
Starting Page	78
Ending Page	81
File Size	368387
Page Count	4
File Format	PDF
ISBN	9781424425808
ISSN	19300395
DOI	10.1109/ICSENS.2008.4716387
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2008-10-26
Publisher Place	Italy
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Temperature sensors Diodes Silicon on insulator technology Thermal sensors Infrared sensors Voltage CMOS process Biomembranes Dielectrics and electrical insulation Temperature measurement
Content Type	Text
Resource Type	Article
Subject	Electrical and Electronic Engineering

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