NDLI: Effect of Sol Strength on Growth, Faceting and Orientation of Sol-Gel Derived ZnO Nanostructures

Content Provider	IEEE Xplore Digital Library
Author	Bahadur, H. Srivastava, A.K. Rashmi Chandra, S.
Copyright Year	2001
Abstract	ZnO thin films are used for a number of MEMS-based sensors because of the piezoelectric and semiconducting properties. In certain class of devices, especially those using surface acoustic wave (SAW) technology on a layered substrate (such as ZnO on Si), it is a requirement to grow several micron thick ZnO layer which must be highly c axis oriented. In this attempt, we have deposited ZnO films by sol-gel spin process and using three different concentrations of 10%, 12.5%, and 25% of sol using zinc acetate as the precursor material and characterized for their thickness and other associated characteristics. The XRD pattern showed diffraction peaks of the hexagonal ZnO phase. The intensity of the 002 peak was much low for low-strength sols indicating substantial preferred orientation of the crystallites perpendicular to the sample surface. The crystallite size was estimated to be about 45 nm from the 100 diffraction peak. For the sample with 25% strength of the sol, the XRD pattern showed diffraction peaks of the hexagonal ZnO phase. The crystallite size was estimated as about 60 nm from the 100 peak and about 145 nm from the 002 peak. The TEM results showed fine nanoparticles with hexagonal ZnO crystal structure and morphology dependence upon the sol strength. Faceted morphology of hexagonal ZnO nanostructures has been obtained. The results would find application in nanoelectronic piezoelectric sensors.
Sponsorship	IEEE Sensors Council
Starting Page	831
Ending Page	836
Page Count	6
File Size	4022963
File Format	PDF
ISSN	1530437X
Volume Number	8
Issue Number	6
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2008-06-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Zinc oxide Crystallization Diffraction Thin film sensors Surface morphology X-ray scattering Semiconductor nanostructures Piezoelectric films Semiconductor thin films Acoustic sensors ZnO Electron microscopy nanostructures sol-gel thin films x-ray diffraction
Content Type	Text
Resource Type	Article
Subject	Instrumentation Electrical and Electronic Engineering

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