NDLI: Micro/nano displacement sensor for piezoelectric actuator with multi-stage expansion mechanism

Content Provider	IEEE Xplore Digital Library
Author	Yong Yu Bo Song Renbing Chen Yunjian Ge
Copyright Year	2010
Description	Author affiliation: Institute of Intelligent Machine, Chinese Academy of Sciences, Hefei, Anhui Province, China (Renbing Chen; Yunjian Ge) \|\| ECE Department, Michigan State University, East, Lansing, US (Bo Song) \|\| Graduate School of Science and Engineering, Kagoshima University, 890-0065, Japan (Yong Yu)
Abstract	In this paper, a micro/nano displacement sensor for PZT actuator which could measure the minute displacement in micron or nanometer level has been proposed. This paper focus on the whole process of this novel sensor from the working principle, parameter determination to the FEM simulation and so forth. This sensor can enlarge the displacement of the PZT by utilizing the lever principle and the strain gauges can perceive the variation without amplifying the noise. About this sensor, we also use the flexure hinges as the rotation joints to obtain the expansion. In addition, we provide the accurate model for this special kind of displacement sensor, and through that people could design and set every parameter freely. Whatever the simulation results in FEM or the experiment data, both of which show that the sensor can perceive the displacement of the PZT actuator in micro/nano scale. Also, the characteristic experiment shows that the proposed sensor has a better performance such as higher level linearity, resolution than its former two generations.
Starting Page	2618
Ending Page	2624
File Size	2270414
Page Count	7
File Format	PDF
ISBN	9781424466740
ISSN	21530866
e-ISBN	9781424466764
DOI	10.1109/IROS.2010.5650144
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2010-10-18
Publisher Place	Taiwan
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Fasteners Mathematical model Force Equations Materials Strain Robot sensing systems Displacement expansion Micro/nano displacement sensor Mathematic model Flexure hinges Strain gauges
Content Type	Text
Resource Type	Article

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