NDLI: Reliability of Suspended Bridges on Superconducting Microstrip Filters Using MEMS Switches

Content Provider	IEEE Xplore Digital Library
Author	Vargas, J.M. Bogozi, A. Noel, J. Hijazi, Y. Vlasov, Y.A. Larkins, G.L.
Copyright Year	2002
Abstract	This work proposes to use capacitive micro-electro-mechanical systems (MEMS) switches built on a superconducting microstrip hairpin filter to investigate the reliability of MEMS for long term survivability. This device is made of a YBa₂Cu₃O₇ thin film deposited on a 20 mm × 20 mm LaAlO₃ substrate by pulsed laser deposition and BaTiO₃ by RF magnetron sputtering, which is utilized as a dielectric insulation layer at the switching points of contact. The major concern for capacitive MEMS switches is stiction between the gold suspended bridge membrane (top layer) and the dielectric material (bottom layer). The main failure mode results from charge build-up at the bottom layer which in turn depends on the actuation voltage. The actuation voltage measured at room and cryogenic temperature is used to derive and calculate the Young's modulus formula which takes into consideration the device geometry, residual stress and mechanical properties of the device. Modified Young's modulus equation will be validated through reliability data of membrane actuation and failure mode. This equation will in turn be used in modeling other RF MEMS devices operating at cryogenic temperatures.
Sponsorship	Council on Superconductivity Appl. Superconductivity Conference Inc MIT
Starting Page	567
Ending Page	570
Page Count	4
File Size	218172
File Format	PDF
ISSN	10518223
Volume Number	21
Issue Number	3
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2011-06-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Biomembranes Gold Cryogenics Fabrication Bridge circuits Superconducting microwave devices Microswitches Young's elastic modulus Actuation voltage MEMS switch microstrip hairpin filter stiction superconductor
Content Type	Text
Resource Type	Article
Subject	Condensed Matter Physics Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering

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Design and Fabrication of Two Switch Superconducting Microstrip Hairpin Filters Using Series MEMS Switches

Elastic modulus study of gold thin film for use as an actuated membrane in a Superconducting RF MEM switch

Temperature variation of actuation voltage in capacitive MEMS switches

Review of the properties of gold material for MEMS membrane applications

Influence of parameters of fabrication on quality and performance of Superconducting MEM switches

Cryogenic Pull-Down Voltage of Microelectromechanical Switches

An RF-MEMS Switch With Low-Actuation Voltage and High Reliability

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Low-Temperature Superconducting DC-Contact RF MEMS Switch for Cryogenic Reconfigurable RF Front-Ends

Reliability of Suspended Bridges on Superconducting Microstrip Filters Using MEMS Switches

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