NDLI: Electron energy loss spectrum application for failure mechanism investigation in semiconductor failure analysis

Content Provider	IEEE Xplore Digital Library
Author	Kun Lin Chia Hung Chao Tsui-Hua Huang Hsiu-Mei Fan Shey-Shi Lu
Copyright Year	2008
Description	Author affiliation: United Microelectron. Corp., Hsinchu (Kun Lin; Chia Hung Chao; Tsui-Hua Huang; Hsiu-Mei Fan)
Abstract	Electron energy loss spectrum (EELS) is widely used for material science analysis (F. R. Chen at al., 1998)(D. B. Williams et al., 1996), such as analyzing material elemental analysis and chemistry compound (Y. Mitsui et al., 1998)(M. Shimada et al., 2005). In semiconductor failure analysis, EELS provides clear evidence for investigating and identifying failure mechanisms and root cause discussions. There are three failure analysis cases in this article. The first one is the nearest atomic number failure analysis. The Z contrast of TEM image is not easy distinguished from Al (13), Si (14), which is obviously identified by EELS $Al-K_{(1560ev)}$ and $Si-K_{(1839ev)}.$ [5] The second case is realized from the EELS result, the failure mechanism is silicon dioxide residue that resulted in a transistor out of specification. The third case is a barrier bridge identified by EELS mapping. From the EELS evidence, the root cause is identified as a insufficient tungsten back chemical mechanical polishing (W-back-CMP). Based on clear identification, the EELS application for failure mechanism investigation is very useful and helpful in Semiconductor Failure Analysis.
Starting Page	589
Ending Page	592
File Size	1534731
Page Count	4
File Format	PDF
ISBN	9781424420490
DOI	10.1109/RELPHY.2008.4558950
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2008-04-27
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Failure analysis Electrons Energy loss Materials science and technology Semiconductor materials Chemical elements Chemistry Silicon compounds Bridges Tungsten
Content Type	Text
Resource Type	Article

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