NDLI: Electrical Characterization of Sub-100nm Features in Semiconductor Devices

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Table of contents

Micro-Scale Structures and Nano-Scale Materials for Chemical and Biological Sensors

Electrical Characterization of Sub-100nm Features in Semiconductor Devices

Implementation of 6kV ESD Protection for a 17GHz LNA in 130nm SiGeC BiCMOS

Optimization of the Temperature Sensor Position for MEMS Gas Flow Meters

Non-Crossing Differential Capacitive MEMS Accelerometer with Electrostatic Spring Tuning

Fabrication of Platinum Membrane on Silicon for MEMS Microphone

Effect of Annealing on the Sol-Gel Derived SrBi4Ti4O15 Thin Films for Piezoelectric Pressure Sensors

Fabrication Study of Solid Microneedles Array Using HNA

Effects of Mechanical Geometries on Resonance Sensitivity of MEMS Out-of-Plane Accelerometer

Structure Design and Fabrication of an Area-changed Bulk Micromachined Capacitive Accelerometer

The Effect of Design Parameters on Static and Dynamic Behaviors of the MEMS Microphone

Deep Trenches in Silicon Structure using DRIE Method with Aluminum as an Etching Mask

Performance Improvement of OTFTs using Double Layer Insulator

Simulation of a Novel Lateral H Structure PIN InGaAs Photodiode with Consistent Electron Drift Length

Distributed CATV Inputs in FTTH-PON System

On the use of a Mixed-Mode Approach For MEMS Testing

A Novel Model for Membranes of Micropumps Partially Loaded with Electromagnetic Forces

Investigation of the Torsion and Bending effects on Static Stability of Electrostatic Torsional Micromirrors

Electromechanical Behavior of Microbeams with Piezoelectric and Electrostatic Actuation

The Gas Sensing Potential of Nanocrystalline SnO2 and In2O3 Powders Prepared by Mechanical Milling

Reduction of Turn-On Voltage in a Single Layer Structured Organic Light-Emitting Diode using Nanocomposites SiO2:PHF

Development of an Integrated Miniaturized Multi-Ion Flow Cell System for Water Quality Measurement

Design and Fabrication of Micromachined Gas Sensors

An Active Integrated Spiral Antenna System for UWB Applications

Analysis of a Bilaminar Circular Piezoelectric Actuator for Micropumps

Degradation of Single Layer MEH-PPV Organic Light Emitting Diode (OLED)

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Fabrication of a Single Carbon Nano Tube for use in Nanolithography of MOSFET Gate

Development of Integrated Detection System for Shock Vibration by using MEMS Accelerometer

Organic Light Emitting Diode (OLED) Using Different Hole Transport and Injecting Layers

How the Optical Properties of Au Nanoparticles are Affected by Surface Plasmon Resonance

Gas Sensing Properties of ZnO:Al Thin Films Prepared by RF Magnetron Sputtering

Factors Affecting the Growth of Carbon Nanotubes

Effect of Self-Weight and Non-Rigidity on the Bending Characteristics of Surface Micromachined MEMS Test Structures

Low Temperature Carbon Nanotube Fabrication using Very High Frequency-Plasma Enhanced Chemical Vapour Deposition Method

Design and Modeling of Micromachined Condenser MEMS Loudspeaker using Permanent Magnet Neodymium-Iron-Boron (Nd-Fe-B)

A Hydrogel-based Microvalve for Insulin Delivery Application

Application of Full Factorial Design Method in MEMS Capacitive Thermal Sensor Sensitivity

Design of a High Sensitivity Structure for MEMS Fingerprint Sensor

High-Precision Thickness Control of Silicon Membranes Using Etching Techniques

Aluminum based Two-Port-Clamped-Clamped Resonators

The Use of Photoluminescence Spectra of TiO2 Nanoparticles Coated With Porphyrin Dye Thin Film for Grading Agarwood Oil

Study on the Effect of Q-Switched Nd:Yag Laser Interaction with Al in Variable Magnetic Field

OXADM Multiplex Protection Scheme for Bidirectional Path Switched Ring

Inductively-Tuned K- Band Distributed MEMS Phase Shifter

Crosstalk Enhancement in Multiplexer/Demultiplexer Based Arrayed Wavelength Grating in Dense Wavelength Division Multiplexing

Analytical Model Studying of a Novel Tunable Capacitor Based on Bimetallic Thermal Actuator

Uniformity Study of GaAs-based Vertical-Cavity Surface-Emitting Laser Epiwafer Grown by MOCVD Technique

Electro-Opto Characteristics of 850 nm Oxide-Confined Vertical-Cavity Surface-Emitting Lasers

Efficiency and Spectral Characteristics of 850 nm Oxide-Confined Vertical-Cavity Surface-Emitting Lasers

2D Silicon-based Photonic Crystals

Calculation of Quantum Efficiency for Resonant Cavity Photodiodes using the FDTD Method

Static Quasi 3D Thermal Simulation of Ion Implanted Vertical Cavity Surface Emitting Lasers

The Effect of Annealing on the Performances of the White Organic Light Emitting Diode (OLED)

Considering RFID Inmate Tagging Application to Enhance Prison Management

Challenges in Implementing RFID Tag in a Conventional Library

Investigating the Performance of RF MEMS Switches

Comparison of Electronic Transport Parameter of CNT(10,10)/CNT(17,0) and CNT(5,5)/CNT(8,0) Carbon Nanotube Metal-Semiconductor On-Tube Heterojunction

See-saw Type RF MEMS Switch with Fine Gap Vertical Comb

Numerical Modeling of a Diffusion-Based In0.53Ga0.47As Lateral PIN Photodiode for 10 Gbit/s Optical Communication Systems

The Effect of Surface Microstructure on The Response of Titanium Dioxide Coated with Cobalt-Porphyrin Thin Films Towards Gases in Quartz Crystal Microbalance Sensor

Synthesis and Characterization of CuO Nanowires

Analytical Modeling of Optical Cross Add and Drop Multiplexing Switch

Modelling and Analysis of a Transformer based MEMS Piezoelectric Vibration Type Microgenerator

A Novel Successive Interference Cancellation Scheme in OCDMA System

Simulation of Piezo-Resistive Metal Gauge on Rectangular Membrane for Low Pressure Application

Design and Modeling of an Electromagnetic Levitated and Actuated Micromotor

Fabrication of White Polymer Light Emitting Diodes with ITO/PVK:PBD:DPVBi:DCJTB/Al Structure

Homodyne Linear Crosstalk Impact in an Array Waveguide Router as an OADM for WDM Networks

Avalanche Multiplication and Excess Noise Factor of Heterojunction Avalanche Photodiodes

Faults Detection Approach for Self-Testable RF MEMS

MEMS Switch Material Dependency on Designing a Reconfigurable Antenna

Surface and Composition Reactivity of Pt/GaN Catalytic Contact as Schottky Barriers Gas Sensor

Metals/GaN Catalytic Contact Properties for Hydrogen Gas Sensor Applications

A Low-Cost CMOS Reconfigurable Receiver for WiMAX Applications

Characterization of Contact Etching Profile for 0.35um Analog Mixed Signal Product Development

Comparison of the Growth Si-based Crystalline Silicon Carbide (SiC) by Chemical Vapor Deposition (CVD) using Carbon Monoxide (CO) and Treated Carbon Dioxide (CO2)

Self Heating Characterization of 32V MOSFETs using Pulsed Gate Measurement

Design of 100nm Single-Electron Transistor (SET) by 2D TCAD Simulation

Effect of Rapid Thermal Annealing (RTA) on n-Contact of 980 nm Oxide VCSEL

Development of SiC/MgO Distributed Bragg Reflector using RF Magnetron Sputtering Technique

Temporal Partitioning of Tasks on a Heterogeneous Reconfigurable Architecture

Packet Synchronization Structure with Peak Detection Algorithm for MB-OFDM UWB

Source-Coupled Logic (SCL): Operation and Delay Analysis

Photopthermal Study of Ceramic ZnO Doped with Y2O3

Grain Size Effect on LTCC Tape Performance as Substrate for Microelectronic Devices

Particle Size Analysis of Barium Titanate Powder by Slow-Rate Sol-Gel Process Route

Rapid Crystallization by Microwave Heating for Barium Strontium Titanate Powders Prepared using Slow-Rate Sol-Gel Technique

Soft IP Integration and Reuse Challenges in Intel Entry Level Network Processor

Delayering of Gate Poly in Stack & Split Gate Memory Structure

High-Performance In0.52Al0.48As/In0.6Ga0.4As Power Metamorphic HEMT for Ka-Band Applications

Development of the Vacuum Spark as an EUV Source for Next Generation Lithography

TDR Single Ended and Differential Measurement Methodology

Contact Hole Printing in Binary Mask by FLEX Technique

Porous Silicon Dioxide Synthesized using Photoelectrochemical (PEC) Wet Etching

Characteristics of Thermally Treated Contacts on Porous Silicon Based Metal-Semiconductor-Metal (MSM) Photodetector Structures

Softbake and Post-exposure Bake Optimization for Process Window Improvement and Optical Proximity Effect Tuning

FPGA Implementation of an Optimized Coefficients Pulse Shaping FIR Filters

A 10-Bit 50-MSPS Pipelined CMOS ADC

Performance of OCDMA Systems Using AND Subtraction Technique

Pyroelectric Properties of Polyvinylidene Fluoride (PVDF) by Quasi Static Method

Effects of Substrate Temperature on the Properties of Hydrogenated Nanocrystalline Silicon Thin Film Grown by Layer-by-Layer Technique

SIMS Analysis of Gate Oxide Breakdown Due to Tungsten Contamination

Evaluation of Stopping Power of Photo-resist to Ion Implantation by Using SIMS

Design and Analysis of an Ultra Wideband Matrix Mixer

Design and Analysis of Insulate Gate Bipolar Transistor (IGBT) with P+/SiO2 Collector Structure Applicable to High Voltage to 1700 V

Process Optimization of p+LDD in 130nm Process Technology using TCAD Simulation

Effect of N2 and O2 Anneal Gas Ratio For Low Resistance p - Type ZnO Formation

Electrical Properties of p-Type Al - N Codoped ZnO Thin Films

A Highly Compatible Architecture Design for Optimum FPGA to Structured-ASIC Migration

Effect of Mesa Spacing on the Electrical Properties of Mesa Isolation in High Electron Mobility Transistor Structures

Characterization of Si3N4 Metal-Insulator-Metal (MIM) Capacitors for Monolithic Microwave Integrated Circuits (MMIC) Applications

A New High Resolution Frequency and Phase Synthesis Method based on `Flying-Adder' Architecture

A Digital Implementation for UWB Impulse Radio Transceiver

Studies on Failure Mechanism of Al Fluoride Oxide-AlxOyFz on Microchip Al Bondpads

Studies on A Sample Preparation Method for HR-SEM and Application in Failure Analysis of Trench TEOS Gauging Measurement in Wafer Fabrication

An Integrated 2.4GHz CMOS Class F Power Amplifier

Solder Joint Strength Of Lead Free Solders under Multiple Reflow and High Temperature Storage Condition

A Study on Inter-Metallic Compound Formation and Structure of Lead Free SnAgCu Solder System

Design and Simulation of 50 nm Vertical Double-Gate MOSFET (VDGM)

Design and Simulation of a High Performance Lateral BJTs on TFSOI

Weak point and improvement of CMOS Schmitt Trigger Circuit used in Microcontroller about ND-mode ESD

Integration of 8051 With DSP in Xilinx FPGA

Increased Capacitance Density with Metal-Insulator-Metal - Metal Finger Capacitor (MIM-MFC)

Considerations on the C-V Characteristics of Pentacene Metal-Insulator-Semiconductor Capacitors

Characteristics of Serial Peripheral Interfaces (SPI) Timing Parameters for Optical Mouse Sensor

Design Of Experiment (DOE) For Thickness Reduction Of GaAs Wafer Using Lapping Process

Study of Flow Visualization in Stacked-Chip Scale Packages (S-CSP)

An FIB Method Using Progressive Multi-Cut Technique & Application in Failure Analysis of Wafer Fabrication

I/O Process Optimization to Cover Wide Range Operation Voltage

High-Speed Hybrid Parallel-Prefix Carry-Select Adder Using Ling's Algorithm

Study on Alignment Capability and Overlay Performance in 130nm BEOL Lithography Process

Studies on Electron Penetration Versus Beam Acceleration Voltage in Energy-Dispersive X-Ray Microanalysis

Effect of Post Annealing Treatments on the Characteristics of Ohmic Contacts to n-Type InN

Nanoporous InN Films Synthesized using Photoelectrochemical (PEC) Wet Etching

TEM Characterization of Nickel Silicide Process

Investigation and Failure Analysis of "Flower-like" Defects on Microchip Aluminum Bondpads in Wafer Fabrication

Plane-view Transmission Electron Microscopy for Advanced Integrated Circuit

Application of Focus Ion Beam Circuit Edit in Failure Analysis

Circuit Debug using Time Resolved Emission (TRE) Prober - A Case Study

FPGA Implementation of a Canonical Signed Digit Multiplier-less based FFT Processor for Wireless Communication Applications

Low Temperature Heteroepitaxial Growth of 3C-SiC on Si Substrates by Rapid Thermal Triode Plasma CVD using Dimethylsilane

The Influence of Doping Concentration, Temperature, and Electric Field on Mobility of Silicone Carbide Materials

A 0.18μm, 1.8-V CMOS High Gain Fully Differential Opamp Utilized in Pipelined ADC

Low-Voltage, High-Performance Current Mirror Circuit Techniques

VLSI Implementation of 1/2 Viterbi Decoder for IEEE P802.15-3a UWB Communication

Integrated LC VCO Compatible with Memory Process for Gigahertz Clock Generation

A Novel DC-Coupled, Single-Ended to Differential, Transimpedance Amplifier Architecture Based on gm-boosting Technique

Analysis of Airborne Boron and Phosphorus Contaminations on Wafer Surface by TOF-SIMS

Study of Porous Silicon Fabricated by Pulsed Anodic Etching of n-Si(100)

The Effects of High Temperature Storage on Lead Free Solder Joint Material Strength Using Pull Test Method

Failure Analysis Approach in Memory Failure of SOI Devices

Front End Defects on Deep Submicron Devices

Failure Analysis of A Unique Poly Defect

Trenched MOSFET Vgs Uniformity Improvement through Furnace Loading Procedure

Simulation of Flash Memory Characteristics based on Discrete Nanoscale Silicon

Realisation of a Differential Multiplier-Divider based on Current Feedback Amplifiers

A SEM Based Technique To Detect Pin-holes In As-Deposited/As-Grown Dielectrics

A Study Of Yield Loss In Copper Back-End Process Due To Stress And Poor Adhesion Of The Thin Films

Electrical Analysis of High Temperature SAW Resonator Packages

Alignment Mark Architecture Effect on Alignment Signal Behavior in Advanced Lithography

Device Characteristics of HEMT Structures based on Backgate Contact Method

Effect of Indium Content in the Channel on the Electrical Performance of Metamorphic High Electron Mobility Transistors

Design of an RF BJT-Low Noise Amplifier at 1GHz

A 10GHz Reconfigurable UWB LNA in 130nm CMOS

Physical-Based SPICE Model of CMOS STI y-Stress Effect

Optimized Clamp Deployment with Simulation and Characterization in Full-Chip ESD (Electro-Static-Discharge) Design

Dependence of Texture in Al Bondpads on Ta/TaN Bilayer Barrier and its Correlation to Optical Reflectivity in 0.13μm IC Technology

Meeting the Challenges of Elemental Analysis in 90nm & Beyond Technologies - Case Studies of Scanning Auger Nanoprobe

Improved Booth Encoding for Reduced Area Multiplier

A Novel Method to Design Interstage Matching Network in the Smith Chart

Dependence of Radio Frequency Power on Optical, Chemical Bonding and Photoluminescence Properties of Hydrogenated Amorphous Carbon Nitride Films

High Performance Complex Number Multiplier Using Booth-Wallace Algorithm

Effects of High Dose BF2+ Implant on the Improvement of P+ Contact Resistance

A 0.8V Operational Amplifier using Floating Gate MOS Technology

Design of Single-Stage Folded-Cascode Gain Boost Amplifier for 100mW 10-bit 50MS/s Pipelined Analog-to-Digital Converter

Modification and Modeling of Ni/Si Interface for Photodetector Applications

An Enhancement of Decimation Process using Fast Cascaded Integrator Comb (CIC) Filter

Effects of Metal Work Function and Operating Temperatures on the Electrical Properties of Contacts to n-type GaN

Power Deduction in Digital Signal Processing Circuit using Inventive CPL Subtractor Circuit

Design and Synthesis of Mobile Robot Controller using Fuzzy

Development of a Fuzzy Logic Controller Algorithm for Air-conditioning System

Design and Nonlinear Analysis of High-Gain and Broad-Band Distributed Power Amplifier with Traveling-Wave Gain Stages By Harmonic Balance Method

Silicon Chip Removal Technique Using Wet Etching Process for Failure Analysis on Multi-Chip Packages (MCP)

Pulse Generation with Reduced Ringing for Ultra Wide Band Applications in Indoor Wireless Communication

Application of Autosched AP Simulation Model in Wafer Fab

Characteristics of RIE SF6/O2/Ar Plasmas on n-Silicon Etching

Highly Chemical Reactive Ion Etching of Silicon in CF4 Containing Plasmas

Photolithography Process Improvement for Thick Implant Resist Using 120°C Post-Apply Bake

A Versatile HSPICE Electro-Opto-Thermal Circuit Model for Vertical-Cavity Surface-Emitting Lasers

Adopting Electroabsorption Modulator for the WLAN 802.11a Radio over Fibre System

Failure Analysis of Pitting Problem on Microchip Al Bondpads in Wafer Fabrication

Auger PID Characterization of Threshold Voltage Shift and Application in Bond pad Monitoring of Wafer Fabrication

Studies on Failure Mechanism of ET High Via Resistance in Wafer Fabrication

The Effect of Al and Pt/Ti Simultaneously Annealing on Electrical Characteristics of n-GaN Schottky Diode

Epilayer Thickness and Doping Density Variation Effects on Current-Voltage (I-V) Characteristics of n-GaN Schottky Diode

A VLSI Design Framework with Freeware CAD Tools

Implementation of Internal Mixed Signal ESD Protection onto RFID Transponder IC

Device Design Consideration for Nanoscale MOSFET Using Semiconductor TCAD Tools

Nonlinear Stability Analysis of Microwave Oscillators Using Lyapunov Function

Conductivity of Cubic GaMnN Grown on Undoped GaN Layers

A Realistic March-12N Test And Diagnosis Algorithm For SRAM Memories

Characterization of Strained Silicon MOSFET Using Semiconductor TCAD Tools

The Growth of III-V Nitrides Heterostucture on Si Substrate by Plasma-Assisted Molecular Beam Epitaxy

The Energy Band Gap of AlxGa1-xN Thin Films as a Function of Al-Mole Fraction

Queue Time Impact on Defectivity at Post Copper Barrier Seed, Electrochemical Plating, Anneals and Chemical Mechanical Polishing

Analysis of the Output Noise Voltage in CMOS Image Sensor Readout Circuit

Electrical Characteristics of 100 MeV 28Si implantation in GaAs

The Study of Pt/porous GaN Schottky Contact for Hydrogen Sensing

The Characterization of KrF Photoresists and the Effect of Different Chromophore Bulkiness on Line Edge Roughness (LER) for Submicron Technology

Simulation Study on the Performance of SiC-GTO

Failure Analysis of NSOP Problem Due to Al Fluoride Oxide on Microchip Al Bondpads

Studies on A New Sela-FIB Sample Preparation Method and Its Application in Failure Analysis of Wafer Fabrication for 110nm Technology Node and Beyond

Synchrotron Radiation X-ray Diffraction and X-ray Photoelectron Spectroscopy Investigation on Si-based Structures for Sub-Micron Si-IC Applications

A Highly Linear CMOS Down Conversion Double Balanced Mixer

Solder Bump Strength and Failure Mode of Low-k Flip Chip Device

Wavelength Shifting in the Fiber Bragg Grating (FBG) based Encoder and Decoder Modules for SAC-OCDMA System

Effects of the Power Differences in the AND-Subtraction Detection Technique in SAC-OCDMA System Performance

Pulse Power Failure Model Of Power MOSFET Due To Electrical Overstress Using Tasca Method

New I-V Model For AlGaN/GaN HEMT At Large Gate Bias

Simulated Dielectric Characteristics of Pt/BST/Ni-Fe/Cu Multilayer Capacitor Stack for Storage Application

Numerical Analysis of Filamentation in Conventional Double Heterostructure and Quantum Well High-Power Broad-Area Laser Diodes

Monte Carlo Simulation of Surface Annealing before Epitaxial Growth

Analysis of Poly Resistor Mismatch

Modeling of Polyimide MIM Capacitors for Applications in Planar Monolithic Microwave Integrated Circuits

Simulation of InGaN Multiple Quantum Wells (MQWs) Light Emitting Diodes (LEDs)

TCAD Simulation of STI Stress Effect on Active Length for 130nm Technology

Simulation of Electromigration Test Structures with and without Extrusion Monitors

2004 IEEE International Conference on Semiconductor Electronics

ICONIP '02. Proceedings of the 9th International Conference on Neural Information Processing. Computational Intelligence for the E-Age (IEEE Cat. No.02EX575)

ICSE 2000. 2000 IEEE International Conference on Semiconductor Electronics. Proceedings (Cat. No.00EX425)

ICSE'98. 1998 IEEE International Conference on Semiconductor Electronics. Proceedings (Cat. No.98EX187)

ICSE '96. 1996 IEEE International Conference on Semiconductor Electronics. Proceedings

Electrical Characterization of Sub-100nm Features in Semiconductor Devices

Content Provider	IEEE Xplore Digital Library
Author	Lerwen Liu
Copyright Year	2006
Abstract	Summary form only given. Zyvex (www.zyvex.com) is the first molecular nanotechnology company with a vision of developing adaptable, affordable, molecularly precise manufacturing. New tools are required to manipulate nanoscale objects and Zyvex has built a family of nanomanipulators capable of flexible 3D nanomanipulation, The $sProber^{TM}$ and $nProber^{TM},$ which are used by major semiconductor companies worldwide, are capable of probing 90, 65, and 45 nm node technology with 5 nm resolution of movement and cartesian xy,z motion. These systems are installed in scanning electron microscopes (SEMs) or dual beam focused ion beam (FIBs) providing a clean, stable environment for probing and electrical characterization, Zyvex's nanoprobers (consisting of 4, 5, 6 and 8 probes with probe tip size smaller than 50 nm) are capable of characterizing transistors in die and at the contact level, finding and characterizing non visual fails, which are difficult to diagnose with other conventional techniques. Zyvex's nanomanipulator system can also probe copper, gold, and aluminum metal 1 layers. Zyvex's four probe system has been employed to characterize suspected failing transistors that makeup SRAM, DRAM, flash RAM and logic devices. Very recently, Zyvex has developed a novel 8 probe system combined with a FEI SEM to probe an entire SRAM bit cell at the metal 1 layer. The nProbe is also completely encoded and includes many upgrades for higher throughput and easier to use. In this talk, Dr Liu will provide an overview on Zyvex Nanotechnology R&D efforts and its nanoprobing technologies for semiconductor failure analysis as well as next generation device characterization.
File Size	383020
File Format	PDF
ISBN	0780397304
DOI	10.1109/SMELEC.2006.381006
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2006-10-29
Publisher Place	Malaysia
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Semiconductor devices Probes Scanning electron microscopy Random access memory Nanotechnology Ion beams Semiconductor device manufacture Electron beams Contacts Copper
Content Type	Text
Resource Type	Article

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