NDLI: A new method to improve accuracy of leakage current estimation for transistors with non-rectangular gates due to sub-wavelength lithography effects

Content Provider	IEEE Xplore Digital Library
Author	Kuen-Yu Tsai Meng-Fu You Yi-Chang Lu Ng, P.
Copyright Year	2008
Description	Author affiliation: Dept. of Electr. Eng., Nat. Taiwan Univ., Taipei (Kuen-Yu Tsai; Meng-Fu You; Yi-Chang Lu; Ng, P.)
Abstract	Non-ideal pattern transfer from drawn circuit layout to manufactured nanometer transistors can severely affect electrical characteristics such as drive current, leakage current, and threshold voltage. Obtaining accurate electrical models of non-rectangular transistors due to sub-wavelength lithography effects is indispensable for DFM-aware nanometer IC design. In this paper, TCAD device simulations are utilized to quantify the accuracy of a standard equivalent gate length extraction approach for non-rectangular transistors. It is verified that threshold voltage and current density are non-uniform along the channel width due to narrow-width related edge effects, leading to significant inaccuracy in the sub-threshold region. A new EGL extraction method utilizing location-dependent weighting factors and convex parameter extraction techniques is proposed to account for the current density non-uniformity. Preliminary results verified by TCAD simulations indicate that the accuracy of leakage current estimation for non-rectangular transistors can be significantly improved. The method is readily applicable to calibration with real silicon data.
Starting Page	286
Ending Page	291
File Size	648346
Page Count	6
File Format	PDF
ISBN	9781424428199
ISSN	10923152
DOI	10.1109/ICCAD.2008.4681587
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2008-11-10
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Leakage current Lithography Threshold voltage Integrated circuit modeling Current density Manufacturing Electric variables Circuit simulation Parameter extraction Calibration
Content Type	Text
Resource Type	Article
Subject	Computer Graphics and Computer-Aided Design Computer Science Applications Software

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