NDLI: Research on Nano-Imprint Microfabrication and Bonding of Polymer Microfluidic Chips

Content Provider	IEEE Xplore Digital Library
Author	Han Yan Jingping Xu Sheng Liu
Copyright Year	2006
Description	Author affiliation: Wuhan Nat. Lab. for Optoelectronics, Inst. of Microsystems of HUST, Wuhan (Han Yan)
Abstract	Microfluidic chips based on MEMS technology have played significant roles in biomedicine, analytical chemistry and related fields. Polymer materials for microfluidic chips were proven to owe many advantages such as good insulation and optical properties, low price, easy production process, and so on. This paper documents the process of fabricating a silicon mold and the parameters on production of micro-channels by nano-imprinting technology. Study is reported on the bonding of microfluidic chips, including direct thermal bonding and vacuum thermal bonding. The nano-imprint processes are simulated by field limited method, and the corresponding optimization parameters of nano-imprint and bonding are also presented, providing a basis for the mass production of polymer microfluidic chips
Starting Page	1
Ending Page	5
File Size	4621643
Page Count	5
File Format	PDF
ISBN	1424406196
DOI	10.1109/ICEPT.2006.359809
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2006-08-26
Publisher Place	China
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Bonding Microfluidics Chemical technology Silicon on insulator technology Optical polymers Production Micromechanical devices Biochemical analysis Chemistry Biological materials thermal bonding microfluidic nano-imprint PMMA
Content Type	Text
Resource Type	Article

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4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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