NDLI: Positive working photosensitive polymers for semiconductor surface coating

Content Provider	IEEE Xplore Digital Library
Author	Banba, T. Takeuchi, E. Tokoh, A. Takeda, T.
Copyright Year	1991
Description	Author affiliation: Sumitomo Bakelite Co. Ltd., Kanagawa, Japan (Banba, T.; Takeuchi, E.; Tokoh, A.; Takeda, T.)
Abstract	A positive working photosensitive polymer for semiconductor surface coating has been developed. Two types of thermal stable polymers, polyimide with hydroxyl groups and polybenzoxazole (PBO) precursor, were examined. It was confirmed that PBO precursor is superior to polyimide with hydroxyl groups with respect to solvent and humidity resistance. But PBO precursor had only poor adhesion to silicon wafers, and their patterns were stripped easily from substrates in developing with alkaline solution. The effect of the addition of silane coupling agents and the modification of PBO precursor with silicone compound in order to improve their adhesion properties is discussed. As a result, it was found that they had excellent adhesion to silicon wafer during development when they are modified with some silicone polyimides. Through these results, a positive working photosensitive polymer with practical sensitivity and resolution was developed.<>
Starting Page	564
Ending Page	567
File Size	305906
Page Count	4
File Format	PDF
ISBN	0780300122
DOI	10.1109/ECTC.1991.163934
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1991-05-11
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Polymer films Coatings Polyimides Resists Adhesives Solvents Silicon Substrates Circuits Conducting materials
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

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