NDLI: Reducing optoelectric response when functionally tuning thin-film resistors on silicon IC's

Content Provider	IEEE Xplore Digital Library
Author	Barcey, R. Svenson, E.J. Yunlong Sun
Copyright Year	1996
Description	Author affiliation: Burr-Brown Corp., Tucson, AZ, USA (Barcey, R.)
Abstract	Functional laser tuning of monolithic integrated circuits has been used for over twenty years to improve yields and/or device performance. This tuning, or "trimming" is done using Nd:YAG or Nd:YLF laser sources operating at 1.064 microns or 1.047 microns respectively. These conventional wavelengths perform extremely well for passive trimming but can have serious problems when functionally trimming for total device performance. The 1.064 micron or 1.047 micron laser wavelengths or other shorter wavelengths can cause optoelectric responses in semiconductor materials and devices that result in performance drift or complete malfunction of the devices. This paper describes a proprietary, new laser processing technology that dramatically reduces, or virtually eliminates, the laser-induced performance drift or shift of a device during functional trimming. A new laser wavelength is used which is absorbed well by the thin-film resistor materials but is "invisible" to the silicon-based structures. Results are given from actual production devices which were trimmed on an existing laser/tester modified to incorporate the diode pumped laser operating at the new wavelength.
Starting Page	242
Ending Page	246
File Size	794265
Page Count	5
File Format	PDF
ISBN	0780332865
ISSN	05695503
DOI	10.1109/ECTC.1996.517398
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1996-05-28
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Transistors Laser tuning Semiconductor lasers Circuit optimization Pump lasers Thin film circuits Monolithic integrated circuits Integrated circuit yield Semiconductor materials Semiconductor thin films
Content Type	Text
Resource Type	Article
Subject	Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering

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4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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