NDLI: Design and implementation of an atomic force microscope with adaptive sliding mode controller for large image scanning

Content Provider	IEEE Xplore Digital Library
Author	Yuan-Zhi Peng Jun-Wei Wu Kuan-Chia Huang Jyun-Jhih Chen Mei-Yung Chen Li-Chen Fu
Copyright Year	2011
Description	Author affiliation: Electrical Engineering Department, National Taiwan University, Taipei, Taiwan (Yuan-Zhi Peng; Jun-Wei Wu; Kuan-Chia Huang; Jyun-Jhih Chen; Li-Chen Fu) \|\| Mechatronic Technology Department, Nation Taiwan Normal University, Taipei, Taiwan (Mei-Yung Chen)
Abstract	Atomic force microscopy (AFM) is an advanced technique which aims to scan a sample through the use of a probe or a tip; however, conventional atomic force microscope system suffers from the limitation of small scanning range, due to the short travelling range of piezoelectric actuation. In this paper, we propose a large measurement- range AFM scanning system which combines both fine positioners of piezoelectric and electromagnetic actuations. While the piezoelectric positioner provides high speed scanning with nanometer resolution, the precision electromagnetic positioner is capable of 1 $mm^{2}$ large field positioning with 30 nm rms error. The overall design of the stage consists of 4 pairs of electromagnetic actuator, monolithic serial flexure guidance with compression springs, an eddy current damper, and a commercial xyz piezoelectric positioner. Besides, a stationary compact disk/digital versatile disk pick-up-head (CD/DVD PUH) is used to measure the amplitude of samples. Moreover, an adaptive sliding mode controller based on the analytical modeling is used to overcome the unmodeled system uncertainties and external disturbances. Finally, preliminary experiments are presented, demonstrating feasibility of the proposed system.
Starting Page	5577
Ending Page	5582
File Size	614611
Page Count	6
File Format	PDF
ISBN	9781612848006
ISSN	07431546
e-ISBN	9781612848013
e-ISBN	9781612847993
DOI	10.1109/CDC.2011.6161500
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2011-12-12
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Electromagnetics Force Measurement by laser beam Coils DVD Laser beams Springs adaptive sliding mode control Precision motion control electromagnetic actuation CD/DVD PUH
Content Type	Text
Resource Type	Article
Subject	Control and Optimization Control and Systems Engineering Modeling and Simulation

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4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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