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Content Provider | IEEE Xplore Digital Library |
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Author | Peigang Deng Wei Ma |
Copyright Year | 2014 |
Description | Author affiliation: Dept. of Mech. & Aerosp. Eng., Hong Kong Univ. of Sci. & Technol., Hong Kong, China (Wei Ma) || Sch. of Sci., Wuhan Inst. of Technol., Wuhan, China (Peigang Deng) |
Abstract | In this work, we systematically investigate the nonlinear phenomenon of an electrostatic comb driven micro scanning mirror. The system governing equation is illustrated by Mathieu equation. A numerical model is built in MatLab based on the governing equation. The scanning mirror response in both time and frequency domain is simulated. Results are verified by the investigation vehicle, a fabricated MEMS scanning mirror. The experimental and simulation results have a great agreement on showing the similar parametric response and stiffness softening. Unstable region is also observed and well validated by the model. |
Starting Page | 212 |
Ending Page | 215 |
File Size | 491595 |
Page Count | 4 |
File Format | |
ISBN | 9781479947263 |
DOI | 10.1109/NEMS.2014.6908793 |
Language | English |
Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
Publisher Date | 2014-04-13 |
Publisher Place | USA |
Access Restriction | Subscribed |
Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
Subject Keyword | Mirrors Mathematical model Equations Electrostatics Numerical models Oscillators Micromechanical devices electrostatic comb driven micro scanning mirror nonlinear phenomenon Mathieu equation stiffness softening parameter response |
Content Type | Text |
Resource Type | Article |
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