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Content Provider | IEEE Xplore Digital Library |
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Author | Hsu-Chao Hao Ming-Chang Chiang Da-Jeng Yao |
Copyright Year | 2014 |
Description | Author affiliation: Inst. of Power Mech. & Eng., Nat. Tsing Hua Univ., Hsinchu, Taiwan (Ming-Chang Chiang) || Inst. of NanoEngineering & Microsyst., Nat. Tsing Hua Univ., Hsichu, Taiwan (Hsu-Chao Hao; Da-Jeng Yao) |
Abstract | In this research, a surface acoustic wave (SAW) sensor was used for chemical compounds detection such as ammonia, methane, and ammonia/methane mixture gases. The detection results of ammonia/methane mixture gases by polymer deposited on 128° $YX-LiNbO_{3}$ SAW delay lines were presented. To enhance the sensitivity and accuracy of the surface acoustic wave sensors, the sensing chamber and polymer films was improved. Very low concentration of ammonia (~250 ppb) and methane(~9 ppm) could be detected by this SAW sensor. From the sensing database of ammonia and methane, we Figured out that the frequency shift of ammonia/methane mixtures was equal to the sum of frequency shift of ammonia and methane. Besides, the signal loss of ammonia was much stronger than methane in high relative humidity conditions. Here, superposition effect between ammonia and methane sensing signals could be used for the signal intensity prediction of different concentrations ammonia/methane mixture gases. |
Starting Page | 38 |
Ending Page | 41 |
File Size | 811720 |
Page Count | 4 |
File Format | |
ISBN | 9781479947263 |
DOI | 10.1109/NEMS.2014.6908754 |
Language | English |
Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
Publisher Date | 2014-04-13 |
Publisher Place | USA |
Access Restriction | Subscribed |
Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
Subject Keyword | Gases Humidity Surface acoustic waves Surface acoustic wave devices Sensors Optical surface waves Films |
Content Type | Text |
Resource Type | Article |
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