NDLI: Silicon-microactuators: activation mechanisms and scaling problems

Content Provider	IEEE Xplore Digital Library
Author	Benecke, W.
Copyright Year	1991
Description	Author affiliation: Fraunhofer-Inst. fur Mikrostrukturtech., Berlin, Germany (Benecke, W.)
Abstract	Different types of electromechanical microactuators are described and discussed with respect to their most important characteristics (i.e. conversion efficiency, displacement, force, torque, etc.) and power consumption. Different actuation principles can be adapted to IC and micromachining technologies with specific potentials in device miniaturization. An overall evaluation of the different concepts is strongly linked to the specific applications and to the system requirements. Different types of electromechanical silicon microactuators have specific advantages and disadvantages with respect to deflection, force, power consumption, and response time. Some of the conversion principles, especially electrostatically driven structures, offer outstanding qualities with an increasing degree of miniaturization.
Starting Page	46
Ending Page	50
File Size	570453
Page Count	5
File Format	PDF
ISBN	0879425857
DOI	10.1109/SENSOR.1991.148794
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1991-06-24
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Silicon Signal processing Microactuators Transducers Actuators Piezoelectric materials Ferroelectric materials Fabrication Sensor phenomena and characterization Sensor systems
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

Micromechanical sensors

Preparation, characterization and sensor properties of ferroelectric and porous fluoropolymers

Design and Fabrication of Microactuators and Sensors for MEMS

Relaxer ferroelectric polymers for actuators and transducers

Ferroelectric sensors

Fabrication and characterization of piezoelectric micromachined ultrasonic transducers with thick composite PZT films

Explicit relations for the piezoelectric coupling factors of rotated 6mm plates

Fabrication and Characterization of Vertical Travel Linear Microactuator

Large-strain, piezoelectric, in-plane micro-actuator

Silicon-microactuators: activation mechanisms and scaling problems

Similar Documents

Micromechanical sensors

Preparation, characterization and sensor properties of ferroelectric and porous fluoropolymers

Design and Fabrication of Microactuators and Sensors for MEMS

Relaxer ferroelectric polymers for actuators and transducers

Ferroelectric sensors

Fabrication and characterization of piezoelectric micromachined ultrasonic transducers with thick composite PZT films

Explicit relations for the piezoelectric coupling factors of rotated 6mm plates

Fabrication and Characterization of Vertical Travel Linear Microactuator

Large-strain, piezoelectric, in-plane micro-actuator

Silicon-microactuators: activation mechanisms and scaling problems