NDLI: A preliminary study on friction measurements in MEMS

Content Provider	IEEE Xplore Digital Library
Author	Deng, K. Ko, W.H. Michal, G.M.
Copyright Year	1991
Description	Author affiliation: Case Western Reserve Univ., Cleveland, OH, USA (Deng, K.; Ko, W.H.; Michal, G.M.)
Abstract	This study of friction measurements in microelectromechanical systems (MEMs) is aimed at examining static friction measurement techniques, as well as exploring the effects of environmental parameters, including nitrogen, oxygen, and argon at various pressures and humidities. The coefficients of friction between silicon nitride and silicon nitride, silicon nitride and silicon, silicon dioxide and silicon dioxide, and silicon dioxide and silicon dioxide, and silicon dioxide and silicon at various gas pressures are presented along with preliminary interpretations. Exposing the samples to argon resulted in no change in the coefficients of friction, exposing the samples to nitrogen resulted in either a decrease or no change in the coefficients of friction, and exposing the samples to oxygen resulted in an increase in the coefficients of friction. The data suggest that nitrogen acts as a lubricant and adsorbed oxygen acts as an adhesive for the silicon or silicon compound materials tested.
Starting Page	213
Ending Page	216
File Size	402882
Page Count	4
File Format	PDF
ISBN	0879425857
DOI	10.1109/SENSOR.1991.148840
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1991-06-24
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Friction Micromechanical devices Silicon compounds Nitrogen Argon Humidity measurement Microelectromechanical systems Measurement techniques Lubricants Materials testing
Content Type	Text
Resource Type	Article

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1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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