NDLI: Operation of sub-micron gap electrostatic comb-drive actuators

Content Provider	IEEE Xplore Digital Library
Author	Hirano, T. Furuhata, T. Gabriel, K.J. Fujita, H.
Copyright Year	1991
Description	Author affiliation: IBM, Tokyo Res. Lab., Japan (Hirano, T.; Furuhata, T.)
Abstract	Resonant and nonresonant operation of submicron gap, electrostatic, comb-drive actuators is reported. Using a single-mask process and a 4- mu m-thick phosphorus-doped polysilicon layer as the structural material, a resonant actuator and a nonresonant, linear actuator were fabricated and tested. Resonant displacement amplitude of +or-5.2 mu m was observed in a resonant actuator with 0.3- mu m gaps when an AC drive voltage of 11.5 V (peak) without bias was applied. Maximum displacements of 3.6 mu m were observed in a nonresonant linear actuator with 0.2- mu m gaps when a DC drive voltage of 11.1 V was applied. A postrelease assembly technique is used to position and fix the comb-drive suspension such that the drive electrodes of the nonresonant linear actuator are in the submicron gap region prior to the application of the drive voltage. Measured displacements of linear actuators with 0.2-0.65- mu m gaps show little hysteresis and observed performance parameters which are in good agreement with theoretical predictions.
Starting Page	873
Ending Page	876
File Size	572139
Page Count	4
File Format	PDF
ISBN	0879425857
DOI	10.1109/SENSOR.1991.149025
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1991-06-24
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Electrostatic actuators Hydraulic actuators Resonance Drives Materials testing Assembly Electrodes Voltage measurement Displacement measurement Hysteresis
Content Type	Text
Resource Type	Article

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