NDLI: Fabrication and characterization of piezoelectric micromachined ultrasonic transducers with thick composite PZT films

Content Provider	IEEE Xplore Digital Library
Author	Zhihong Wang Weiguang Zhu Hong Zhu Jianmin Miao Chen Chao Changlei Zhao Ooi Kiang Tan
Copyright Year	1986
Abstract	Ferroelectric microelectromechanical systems (MEMS) has been a growing area of research in past decades, in which ferroelectric films are combined with silicon technology for a variety of applications, such as piezoelectric micromachined ultrasonic transducers (pMUTs), which represent a new approach to ultrasound detection and generation. For ultrasound-radiating applications, thicker PZT films are preferred because generative force and response speed of the diaphragm-type transducers increase with increasing film thickness. However, integration of 4- to 20-/spl mu/m thick PZT films on silicon wafer, either the deposition or the patterning, is still a bottleneck in the micromachining process. This paper reports on a diaphragm-type pMUT. A composite coating technique based on chemical solution deposition and high-energy ball milled powder has been used to fabricate thick PZT films. Micromachining of the pMUTs using such thick films has been investigated. The fabricated pMUT with crack-free PZT films up to 7-/spl mu/m thick was evaluated as an ultrasonic transmitter. The generated sound pressure level of up to 120 dB indicates that the fabricated pMUT has very good ultrasound-radiating performance and, therefore, can be used to compose pMUT arrays for generating ultrasound beam with high directivity in numerous applications. The pMUT arrays also have been demonstrated.
Page Count	9
File Size	1146331
Starting Page	2289
Ending Page	2297
File Format	PDF
ISSN	08853010
Volume Number	52
Issue Number	12
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2005-12-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Fabrication Ultrasonic transducers Piezoelectric films Ferroelectric films Ultrasonic imaging Silicon Micromachining Ferroelectric materials Microelectromechanical systems Micromechanical devices
Content Type	Text
Resource Type	Article
Subject	Acoustics and Ultrasonics Instrumentation Electrical and Electronic Engineering

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