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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Petersen, K. Pourahmadi, F. Brown, J. Parsons, P. Skinner, M. Tudor, J. |
| Copyright Year | 1991 |
| Abstract | A resonant pressure sensor has been fabricated which consists of a single-crystal silicon beam located in the center of a single-crystal silicon diaphragm. The beam is excited electrostatically and its motion are detected by piezoresistors. The structure is fabricated with silicon fusion bonding. Overall measurement accuracies of 0.01% have been achieved. This sensor has been designed to meet the exacting standards required for aerospace air data computers and engine control applications where achievable accuracies of 0.1% absolute pressure are required. The principle of operation is imply to measure the change in resonant frequency of a micromachined silicon beam as the pressure exerted on the sensor's diaphragm is changed. |
| Starting Page | 664 |
| Ending Page | 667 |
| File Size | 267025 |
| Page Count | 4 |
| File Format | |
| ISBN | 0879425857 |
| DOI | 10.1109/SENSOR.1991.148968 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 1991-06-24 |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Resonance Sensor fusion Silicon Motion detection Piezoresistive devices Bonding Electrostatic measurements Aerospace control Engines Pressure control |
| Content Type | Text |
| Resource Type | Article |
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