NDLI: Silicon power microsensor with frequency range from DC to microwave

Content Provider	IEEE Xplore Digital Library
Author	Kopystynski, P. Obermeier, E. Delfs, H. Loser, A.
Copyright Year	1991
Description	Author affiliation: Tech. Univ., Berlin, Germany (Kopystynski, P.; Obermeier, E.)
Abstract	The authors introduce a thermal power sensor with an extremely wide bandwidth (DC to 26 GHz). The electrical signal to be measured is converted into thermal energy in a laser-trimmed 50- Omega -nichrome resistor which is arranged at the center of an anisotropically etched silicon diaphragm. The temperature increase of this heat source compared with the chip frame functioning as a heat sink is detected by means of a silicon-metal thermocouple. Across several orders of magnitude, its Seebeck voltage depends on the RMS value of the electrical input signal in an approximately linear manner. The authors show the theoretical considerations worked out to design the sensor, explain how it was implemented technologically, and present the results of the measurements performed to record its technical characteristics, which conform very well with the design calculations.
Starting Page	623
Ending Page	626
File Size	396313
Page Count	4
File Format	PDF
ISBN	0879425857
DOI	10.1109/SENSOR.1991.148956
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1991-06-24
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Silicon Microsensors Frequency Heat sinks Electromagnetic heating Thermal sensors Bandwidth Energy measurement Electric variables measurement Semiconductor device measurement
Content Type	Text
Resource Type	Article

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3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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