NDLI: A micromechanical structure eliminating lateral effect of silicon accelerometer

Content Provider	IEEE Xplore Digital Library
Author	Bao Minhang Chen Jian Shen Shaoqun
Copyright Year	1991
Description	Author affiliation: Dept. of Electron. Eng., Fudan Univ., Shanghai, China (Bao Minhang; Chen Jian; Shen Shaoqun)
Abstract	A novel two-mass micromechanical structure for a silicon accelerometer is described. In this structure, each mass is attached to the rim by two beams and a fifth beam bridges the two masses at the central area of the structure. An acceleration normal to the device plane can bring about significant stress in the central beam area while any lateral acceleration in a direction in the device plane has very little effect on the stress to the first order of approximation. As the stresses in the central beam area are of a single sign and change very little on position, four piezoresistors can be located on the central beam area to form a Wheatstone bridge or a single-element Hall-type strain gauge can be used to sense the normal acceleration with little interference by lateral accelerations. Preliminary results on the device are presented.
Starting Page	101
Ending Page	103
File Size	189882
Page Count	3
File Format	PDF
ISBN	0879425857
DOI	10.1109/SENSOR.1991.148810
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1991-06-24
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Micromechanical devices Silicon Acceleration Stress Particle beams Accelerometers Piezoresistive devices Bridge circuits Capacitive sensors Interference
Content Type	Text
Resource Type	Article

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1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
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3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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