NDLI: Hybrid-type Surface Thermometer at High Temperature

Content Provider	IEEE Xplore Digital Library
Author	Hiraka, K. Iuchi, T.
Copyright Year	2006
Description	Author affiliation: Sensor Photonics Res. Center, Toyo Univ., Kawagoe (Hiraka, K.)
Abstract	We have developed a hybrid-type surface thermometer which combines the advantages of contact and non-contact methods, offering a way of overcoming the weak points of both methods. The hybrid-type surface thermometer is composed mainly of two components: i) a metal film that makes contact with the object and measure its temperature, and ii) an optical sensor that is used to detect the radiance of the rear surface of the metal film. Temperature measurement using this thermometer is possible within a random error of plusmn0.5 K after compensating systematic errors in the temperature range from 900 to 1000 K. This thermometer provides a useful means for calibration of in-situ temperature measurement in various processes, especially in the semiconductor industry. This paper introduces the basic idea of the hybrid-type surface thermometer, presents experimental results and discussions
Starting Page	3330
Ending Page	3335
File Size	6253031
Page Count	6
File Format	PDF
ISBN	8995003847
DOI	10.1109/SICE.2006.315016
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2006-10-18
Publisher Place	South Korea
Access Restriction	Subscribed
Rights Holder	The Institute of Control, Automation and Systems
Subject Keyword	Optical surface waves Temperature sensors Temperature measurement Optical films Surface resistance Radiometry Optical sensors Optoelectronic and photonic sensors Thermal sensors Object detection thin film Surface temperature radiation thermometry emissivity thermal contact resistance
Content Type	Text
Resource Type	Article

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